2016
DOI: 10.1016/j.moem.2016.09.003
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Research of acceptor impurity thermal activation in GaN: Mg epitaxial layers

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Cited by 9 publications
(2 citation statements)
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“…Рост легирования Mg ограничен самокомпенсацией примеси Mg [45,46]; образованием дефектов донорного типа на основе Mg (Mg i −V N , Mg Ga −V N ). Выбор оптимальных условий легирования и режима отжига важен для синтеза эпитаксиальных слоев p-GaN с низким сопротивлением [47].…”
Section: обсуждение результатовunclassified
“…Рост легирования Mg ограничен самокомпенсацией примеси Mg [45,46]; образованием дефектов донорного типа на основе Mg (Mg i −V N , Mg Ga −V N ). Выбор оптимальных условий легирования и режима отжига важен для синтеза эпитаксиальных слоев p-GaN с низким сопротивлением [47].…”
Section: обсуждение результатовunclassified
“…have been rapidly developed, began to enter the commercial market. [26][27] In general, the achievements in P-GaN research in recent years can be roughly divided into the following categories: [28][29][30][31][32][33][34][35][36][37][38][39][40][41] Hull and Chung et al studied the role of O 2 in the annealing atmosphere during P-GaN annealing. Among them, the latter compared the effect of annealing in N 2 atmosphere with annealing temperature Nakagawa et al also studied the annealing of P-GaN films under N 2 and O 2 atmospheres, and replaced the H in the NH3 atmosphere of the epitaxial layer cooling process with deuterium (D).…”
Section: P-type Gan Materials Has a Low Carrier Concentration Due To ...mentioning
confidence: 99%