Research of continuous fiber laser sustained Xe plasma

Hu, Yanfei; Wang, Xinbing; Zuo, Duluo

doi:10.1016/j.vacuum.2022.111229

Cited by 12 publications

(3 citation statements)

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“…传导和对流损失相平衡. 平衡位置与尺寸大小受到激光入射功率、激光模式 [16,17] 、聚焦能力 [6,[18][19][20] 、气体压强及对流流速 [6,21,22] 等参数的影响. 现有的实验与模拟研究结果显示, 特定条件下可以观察到呈现双峰形态的LSP温度分布 [20,23,24] .…”

Section: 自连续高功率unclassified

“…学问题研究所Zimakov等 [19] 与北京航空航天大学Shi等 [16] 的实验结果均表明, 更高的功率会增加LSP的长度与核心温度, 进而获得辐射强度更高的光源. 同时降低激光F数会显著提高激光阈值功率, 产生的LSP长度与长宽比减小, 同时LSP 辐射光谱中波长小于的部分占总光谱强度的比例提升.…”

Section: 自连续高功率unclassified

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Multiphysics modeling and simulations of laser-sustained plasmas

Zhang,

Liu,

2024

Acta Phys. Sin.

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Laser-sustained plasmas (LSP), which can be utilized for a novel radiation light source, have advantages such as high irradiance, broad spectral range, and stable emission, demonstrating significant applications for wafer inspection in the field of the semiconductor industry. This paper revisited the historical development of LSP research and introduced fundamental physical processes in LSP. The mathematical description equations for LSP and methods for calculating plasma parameters are given, based on which a time-dependent two-dimensional fluid model is established with laser-thermal-hydrodynamic coupling effects. The propagation of the laser in plasmas is investigated based on the established model, and the fundamental mechanisms in LSP, including the initial evolution process, laser energy deposition, steady-state characteristics, and instability, are explored. The effectiveness of the simulation model is confirmed through comparisons with the results from high-pressure Xe LSP experiments. The findings indicate that the mode, power, F number of incident lasers, as well as parameters including components, pressure, and flow velocity of gas, influence the steady-state properties of LSPs. Under identical power and F number conditions, Gaussian mode and annular mode lasers produce LSP with different shapes and positions. Notably, under conditions of high-power annular laser incidence, large laser F numbers, and high flow velocities, the simulation results reveal temporal and spatial instability in LSP. These simulation results contribute significantly to a deeper understanding of the underlying physical mechanisms of LSP. Furthermore, they provide a theoretical basis for the design of light source systems and the optimization of multiple parameters. The impact of laser parameters on LSP properties elucidated in this study advances not only the fundamental understanding of LSP but also offers crucial insights for the design and optimization of light source systems in various applications, particularly in the field of optical detection for semiconductor wafer inspection.

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Section: 自连续高功率unclassified

Multiphysics modeling and simulations of laser-sustained plasmas

Zhang,

Liu,

2024

Acta Phys. Sin.

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“…Lu et al conducted experimental measurements of argon-LSP using optical emission spectroscopy to estimate the electron temperature and density [15]. Experimental results on the effects of laser power and F-number on the size, radiation, and sustaining power of xenon LSP, as well as the presence of instabilities, have been reported by Hu et al [16]. Shi et al experimentally discovered that a ring mode laser, compared to a Gaussian mode, can generate LSP with a smaller volume and higher brightness [17].…”

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Formation and evolution of multiple-core structures in laser-sustained plasmas

Liu,

Zhang,

2023

New J. Phys.

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We report on the formation of multiple-core structures in laser-sustained plasmas (LSPs) through the utilization of an improved two-dimensional laser-thermal-hydrodynamically coupled fluid model. Our findings reveal that steady-state LSPs exhibit various temperature structures, including single, double, and triple cores, as the input laser power increases incrementally. The spatiotemporal distributions of these multiple-core structures are demonstrated, and the presence of an LSP core is identified when the rate of enthalpy change becomes positive. This behavior is predominantly influenced by factors such as laser power absorption, radiation, and diffusion along the laser path. The obtained results provide explicit insights into the temperature structures within LSPs, thereby potentially contributing to the advancement of LSP-based light sources for optical wafer defect inspection in the semiconductor industry.

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