Research of dry tribochemical mechanical polishing SiC with an innovation abrasive-catalytic abrasive cluster

Wang, Zhankui; Ding, Yangyang; Wang, Pengzhan; Pang, Mingjun; Zhao, H. S.; Ma, Li; Nie, Fuquan; Su, Jianxiu

doi:10.1007/s00170-023-11613-9

Cited by 4 publications

(1 citation statement)

References 42 publications

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“…As a machining tool for MAF, the performance of magnetic abrasive particles (MAPs) plays a crucial role in the grinding process [8][9][10][11]. Mohammad et al used Al 2 O 3 MAPs prepared by the sintering method and simulated the surface polishing of silicon wafers with the MAF process by a SPH/FEM coupled algorithm [12].…”

Section: Introductionmentioning

confidence: 99%

A Comparative Study of Machining Property in Inconel 718 Superalloy Grinding with Al2O3- and CBN/Fe-Based Spherical Magnetic Abrasives

Jiang,

Zhang,

Zhang

et al. 2024

Coatings

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A comparative analysis was studied on the finishing performance of spherical CBN/Fe-based magnetic abrasive particles (MAPs) and Al2O3/Fe-based magnetic abrasive particles (MAPs) prepared by the gas atomization method in the magnetic abrasive finishing (MAF) of the Inconel 718 superalloy. In the MAF, it was found that compared with Al2O3/Fe-based MAPs, CBN/Fe-based MAPs have a lower grinding temperature and generate less heat during the grinding of the Inconel 718 superalloy. The grinding pressure generated on the workpiece is relatively stable (Al2O3/Fe-based MAPs have a larger fluctuation range of grinding pressure on the workpiece surface during the grinding process). The surface roughness of the workpiece rapidly drops from Ra 0.57 μm to Ra 0.039 μm, and the material removal reaches 42 mg within 20 min. After finishing, the scratches on the surface of the workpiece basically disappear, the contour curve is relatively flat, and there is almost no adhesion on the surface of the workpiece. The mirror effect of the superalloy surface is good, and ultimately a better surface quality can be obtained.

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Section: Introductionmentioning

confidence: 99%

A Comparative Study of Machining Property in Inconel 718 Superalloy Grinding with Al2O3- and CBN/Fe-Based Spherical Magnetic Abrasives

Jiang,

Zhang,

Zhang

et al. 2024

Coatings

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Enhanced manufacture technology based on emission reduction and carbon reduction in cutting and grinding

Li,

Zhang,

Said

2024

Int J Adv Manuf Technol

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Center-injected Polishing for Efficient Slurry Utilization

Kim,

Yoon,

Kim

et al. 2024

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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Polishing is one of the most crucial finishing processes and usually consumes a sufficient slurry to achieve an ultra-fine surface. However, excess slurry consumption is environmentally costly, as it generates a large amount of wastewater. Given the growing environmental concerns, it is essential to improve the process efficiency and minimize the environmental burdens. Considering this, a novel polishing system, herein referred to as center-injected polishing, is proposed by injecting slurry into the center of the polishing pad. Here, it is aimed to utilize the centrifugal force of the rotating pad, with the aim of efficient slurry utilization. The slurry is directly introduced between the pad and the workpiece, then dispersed across the pad by centrifugal force. A simple experiment was conducted with computational analysis using the specially designed polishing tool to prove the concept; slurry was distributed more uniformly in center-injected polishing when compared to the conventional process. The polishing system was then constructed to evaluate polishing performances. Based on sets of experiments in the polishing of silicon carbide (SiC), slurry efficiencies and productivity were analyzed with respect to different rotational speeds and slurry supply rates. The material removal rate (MRR) was more than twice the rate achieved by conventional polishing at the same processing conditions; whereas the slurry consumption was approximately 60% less at the same MRR. The extended Preston equation was used to predict the MRR of the new process. It is expected that efficient slurry utilization will reduce the environmental footprint of abrasive processes.

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Research of dry tribochemical mechanical polishing SiC with an innovation abrasive-catalytic abrasive cluster

Cited by 4 publications

References 42 publications

A Comparative Study of Machining Property in Inconel 718 Superalloy Grinding with Al2O3- and CBN/Fe-Based Spherical Magnetic Abrasives

A Comparative Study of Machining Property in Inconel 718 Superalloy Grinding with Al2O3- and CBN/Fe-Based Spherical Magnetic Abrasives

Enhanced manufacture technology based on emission reduction and carbon reduction in cutting and grinding

Center-injected Polishing for Efficient Slurry Utilization

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