The wear rate of titanium alloys VT1-0, TC5, VT6, VT14, OT4 under the action of microshocks due to cavitation, which is created in distilled water under the surface of the ultrasonic wave emitter, were determined. It was found that the increase in hardness and improvement of cavitation wear resistancefor these alloys depends on the alloying elements, and is also increased after heat treatment and ion-plasma modification of the sample surface. Although no unambiguous correlation was found between the structural class of the alloys and their cavitation wear. Due to ion-plasma modification of alloys, the cavitation wear resistanceis increased by several times, in particular, the VT6 alloy by 3 times. The phase composition of the samples before and after ion-plasma modification was studied and it was found that alloy resistance to cavitation significantly depends on it.