Research of MOEMS Pressure Sensor

Abstract

In recent years, with the development of optical communication by leaps and bounds, promote the Micro-opto-electro-mechanical system (MOEMS) development. As a new technology, the MOEMS have been widely used in optical communication, optical switching, data storage, optical sensing and etc.. Compared with the traditional pressure sensors, the optical pressure sensor based on MOEMS has some unique advantages. In this paper, the structures, operation principles and fabrication processes of various MOEMS pressure sensors are described mainly. Finally, the structure and Key technology of a MOEMS pressure sensor array is presented in brief.