Research of Vibration Oscillations of Mems Resonators During Their Operation

Abstract

A mathematical model has been developed to study the amplitude-frequency characteristics of the resonator beam. Nonlinear mechanics methods were used in the modeling process. The model takes into account the influence of changes in the elastic properties of the beam material on its oscillation amplitude and frequency. To analyze the internal processes in the material, Voigt's and Bolotin's laws were applied. The modeling results showed that an increase in the elastic component of the beam material leads to a rise in the oscillation amplitude and a decrease in the oscillation frequency.