Research on a 3-DOF Compliant Precision Positioning Stage Based on Piezoelectric Actuators

Ren, Guang; Zhang, Quan; Li, Chaodong; Zhang, Xu

doi:10.1007/978-3-319-65292-4_30

Cited by 3 publications

(1 citation statement)

References 14 publications

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“…For instance, Gan et al [57] used a lever amplifier to amplify the stroke of PEA. More researchers, such as Bhagat et al [58], Li et al [59], Dao et al [60], Qu et al [61] and Ren et al [62], used a similar lever amplifier. In addition, the guiding mechanism is added to the output end of the lever to enhance the directionality of the output motion.…”

Section: Lever-type Amplifiermentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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