2022
DOI: 10.1063/5.0076649
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Research on a large opening and high flow rate piezoelectric pump with straight arm wheeled check valve

Abstract: Piezoelectric pumps are applied in cooling systems of microelectronic devices because of their small size. However, cooling efficiency is limited by the low flow rate. A straight arm wheeled check valve made of silica gel was proposed, which can improve the flow rate of piezoelectric pumps, solve the influence of glue aging on the sealing ability of a wheeled check valve, and reduce the size of piezoelectric pumps. This paper discusses the influence of the valve arm number (N = 2, 3, and 4), the valve arm widt… Show more

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Cited by 3 publications
(2 citation statements)
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“…When the piezoelectric actuator is at the extreme positions of vibration, the maximum value of the volume change quantity, , in the pump chamber can be regarded as the volume of a fusiform body composed of two curved surfaces, both above and below. By leading into , which is the deformation curve equation of the piezoelectric actuator, can be integrated as follows [ 43 ]: …”
Section: Design and Operating Principlementioning
confidence: 99%
“…When the piezoelectric actuator is at the extreme positions of vibration, the maximum value of the volume change quantity, , in the pump chamber can be regarded as the volume of a fusiform body composed of two curved surfaces, both above and below. By leading into , which is the deformation curve equation of the piezoelectric actuator, can be integrated as follows [ 43 ]: …”
Section: Design and Operating Principlementioning
confidence: 99%
“…The pump achieved a maximum flow rate of 58.6 mL/min and a maximum pressure of 28.7 kPa. Lipeng He et al [25]designed a piezoelectric pump with a straight-arm wheel-type one-way valve. The flow rate within a high-frequency range can be enhanced by reducing the number of valves, thickness, and width of valve arms.…”
Section: Introductionmentioning
confidence: 99%