Research on characteristics of orifice type radial aerostatic bearings under high-speed condition

Ma, Wei; Yu, Hongxing; Wang, Zuwen; Chen, Longxing; Liu, Haiyan; Zhao, Guang

doi:10.1109/fpm.2011.6045831

Cited by 2 publications

(2 citation statements)

References 7 publications

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“…In recent years, the throttling mode and structure of aerostatic lubrication have been investigated thoroughly. Orifice throttling is widely used, because of the ease of implementation and excellent characteristics [4], [5]. However, it has the disadvantage that stiffness and stability often present a mutual tradeoff [6], [7].…”

Section: Introductionmentioning

confidence: 99%

Improving the Rotational Stiffness of Compact Aerostatic Guideway by Micro-Structures Optimization

Zhang

et al. 2019

IEEE Access

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To meet the requirement for the exact computation of rotational stiffness, this paper puts forward a mesh adaptation based analysis method for a compact multi-throttle aerostatic guideway and its constituent micro-structure. Contrary to previous methods that substituted or even ignored them, the dimensionless thickness pertaining to the depth of the micro-structure is restored and incorporated into each computational grids. The mesh adaptation procedures accept the dimensionless thickness as an intermediate variable for the target mesh and apply local modifications to adapt the mesh to match the specified size. Then, the varying regularity of rotational stiffness by micro-structures can be studied by k-ε turbulence model when tilt. The tilt angle, although small, leads to a wedge-shaped film and then an uneven pressure distribution which has been also taken into consideration. Guided by the mesh adaptation method, a vertical compact guideway with high rotational stiffness of 7.22 × 10 3 Nm/rad is designed and manufactured for photolithography. The experiments verify its practical accuracy and effectiveness.

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Section: Introductionmentioning

confidence: 99%

Improving the Rotational Stiffness of Compact Aerostatic Guideway by Micro-Structures Optimization

Zhang

et al. 2019

IEEE Access

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“…Wenqi Ma et al [6] studied the characteristics of orifice restriction in aerostatic radial bearings and compared this with other methods of restriction. Li Yuntang et al [7] analyzed aerostatic thrust bearings in a quest for the best design parameters.…”

Section: Introductionmentioning

confidence: 99%

The Static Analysis of a Porous Aerostatic Bearing

Chien¹,

Chen²,

Chen³

2015

Third International Conference on Advances in Computing, Control and Networking - ACCN 2015

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Abstract-A study was made of a porous aerostatic bearing by analysis of its relevant static characteristics. The purpose was to authenticate the theoretical computing results in terms of previously published data. The porous aerostatic bearing and its working mechanism was first introduced after which the mathematical model and the boundary conditions were built. Graphs of the characteristics of the porous aerostatic bearing were made that included data about capacity and clearance and a comparison was made between these findings and the accepted published data to establish and verify correctness of the theory.

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Research on characteristics of orifice type radial aerostatic bearings under high-speed condition

Cited by 2 publications

References 7 publications

Improving the Rotational Stiffness of Compact Aerostatic Guideway by Micro-Structures Optimization

Improving the Rotational Stiffness of Compact Aerostatic Guideway by Micro-Structures Optimization

The Static Analysis of a Porous Aerostatic Bearing

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