Kinematic accuracy is a crucial indicator for evaluating the performance of mechanisms. Low-mobility parallel mechanisms are examples of parallel robots that have been successfully employed in many industrial fields. Previous studies analyzing the kinematic accuracy analysis of parallel mechanisms typically ignore the randomness of each component of input error, leading to imprecise conclusions. In this paper, we use homogeneous transforms to develop the inverse kinematics models of an improved Delta parallel mechanism. Based on the inverse kinematics and the first-order Taylor approximation, a model is presented considering errors from the kinematic parameters describing the mechanism’s geometry, clearance errors associated with revolute joints and driving errors associated with actuators. The response surface method is employed to build an explicit limit state function for describing position errors of the end-effector in the combined direction. As a result, a mathematical model of kinematic reliability of the improved Delta mechanism is derived considering the randomness of every input error component. And then, reliability sensitivity of the improved Delta parallel mechanism is analyzed, and the influences of the randomness of each input error component on the kinematic reliability of the mechanism are quantitatively calculated. The kinematic reliability and proposed sensitivity analysis provide a theoretical reference for the synthesis and optimum design of parallel mechanisms for kinematic accuracy.