Research on methods of regression analysis and nonlinear programming for calibrating a goniometer

Korolev, Aleksander N.; Lukin, A. Ya.; Venediktov, Vladimir Yu.; Ivashchenko, E. M.

doi:10.1364/jot.89.000346

J. Opt. Technol.

2022

DOI: 10.1364/jot.89.000346

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Research on methods of regression analysis and nonlinear programming for calibrating a goniometer

Aleksander N. Korolev

A. Ya. Lukin

Vladimir Yu. Venediktov

et al.

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2024

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Development of matrix technology of linear-angular measurements

Korolev,

Lukin,

Filatov

et al. 2024

Optical Metrology and Inspection for Industrial Applications XI

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Studies of matrix angle meters with a scale diameter of 5 and 23 mm have been carried out. The objective of the research was to assess the possibility of achieving the predicted metrological parameters at the level of hundredths of an arc second for angle measurements and several nanometers for linear. To do this, work was carried out to stabilize the meters using a heat sink and thermal protection. Angular measurements were carried out on the basis of a goniometer rotary platform with an angle sensor LIR. Linear measurements were carried out on a two-channel stand with two identical matrix displacement meters. In both experiments, 1.3 Megapixel CMOS digital cameras were used as an image analyzer. It is concluded that the random error of the studied matrix meters does not exceed 0.05 arc-sec for angular measurements and 15 nm for measuring displacements.

show abstract

Development of matrix technology of linear-angular measurements

Korolev,

Lukin,

Filatov

et al. 2024

Optical Metrology and Inspection for Industrial Applications XI

View full text Add to dashboard Cite

show abstract

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Research on methods of regression analysis and nonlinear programming for calibrating a goniometer

Cited by 1 publication

References 0 publications

Development of matrix technology of linear-angular measurements

Development of matrix technology of linear-angular measurements

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