Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis

Abstract

Traditional sensors, such as pressure, piezoelectric or piezoresistive, mostly use square silicon-based materials as chassis and use Wheatstone bridge circuits to measure pressure and resistance values. Nowadays, reducing the size of sensors is also a problem to be solved in the increasingly wide range of sensor applications. In this paper, a circular monocrystalline silicon base pressure sensor is designed and its performance is studied. We applied COMSOL software to model the circular chassis base pressure sensor, tested the deformation of the circular chassis base pressure sensor under different access volttimes and pressures, analyzed its sensitivity and other performance, and compared the above performance with the rectangular monocrystalline silicon chassis base pressure sensor. The experimental results show that the circular monocrystalline silicon chassis pressure sensor has excellent electrostriction performance, and the variation of the potential and potential difference in the measuring area is more obvious than that of the rectangular monocrystalline silicon chassis pressure sensor. This paper provides a reference for sensor makers.