Research on Sapphire Deep Cavity Corrosion and Mask Selection Technology

Shang, Yiingqi; Zhang, Hongquan; Zhang, Yan

doi:10.3390/mi12020136

Cited by 3 publications

(1 citation statement)

References 18 publications

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“…A variety of unique microstructures can be made with ODE having specific geometric characteristics such as sharp corners or flat surfaces. Some of the main applications of anisotropic etching are surface-texturing of sapphire [38][39][40][41][42][43][44][45][46][47], micro/nanostructuring of crystalline silicon [34,48], or processing of crystalline quartz [49]. Anisotropic etching is also used for highlighting surface or subsurface defects of a single crystal material [50], or to understand the crystallographic structure and symmetry.…”

Section: Crystallographic Structure and Anisotropic Etching Of Sapphirementioning

confidence: 99%

Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes

Capuano

Berenschot²,

Tiggelaar³

et al. 2022

J. Micromech. Microeng.

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In this paper a processing technique for sapphire is presented which combines laser-induced amorphization and subsequent selective wet etching of amorphized sapphire as well as anisotropic wet etching of single-crystalline sapphire (α-Al2O3). Using this technique, microstructures can be realized on the surface and in the bulk of sapphire substrates. By focusing ultra-short laser pulses inside sapphire, its structure can be transformed from crystalline into amorphous. The modified material can be selectively removed using etchants, such as hydrofluoric acid (HF) or potassium hydroxide (KOH), solely dissolving the amorphized part. In this work, however, an etchant consisting of a standard solution of sulphuric acid and phosphoric acid (96 vol% H2SO4 : 85 vol% H3PO4, 3:1 vol%) at 180 °C is utilized. This method allows the realization of structures which are impossible to achieve when using conventional etchants which solely dissolve the amorphized sapphire. Ultrashort pulsed laser irradiation (230 fs) is used in this study as starting point for the subsequent anisotropic etching to form microstructures on the surface or in the bulk of sapphire that are terminated by characteristic crystal planes. In particular, the appearance of etching-induced patterns formed by stacks of rhombohedra is shown for structures below the surface, whereas triangular pits are achieved in surface processing.

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Section: Crystallographic Structure and Anisotropic Etching Of Sapphirementioning

confidence: 99%

Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes

Capuano

Berenschot²,

Tiggelaar³

et al. 2022

J. Micromech. Microeng.

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Status and prospects of surface texturing: design, manufacturing and applications

Song,

Huang,

Wang

et al. 2023

Surf. Sci. Tech.

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In recent years, the requirements for high-quality development in the manufacturing industry and extreme application conditions have increasingly demanded higher equipment performance. The surface and interface condition of components is directly related to the stability, reliability and service life of equipment. The development of high-performance or multi-performance surface texturing is of great significance for the effective improvement of mechanical properties, optical properties, catalytic properties and biological properties of surfaces. This paper summarizes the application of textured surfaces in improving the physical, chemical and biological properties of surfaces; outlines the types of texturing patterns and the design methods; analyzes the main technical methods and their characteristics for the preparation of surface textures in additive manufacturing, subtractive manufacturing and equal material manufacturing; and makes outlooks on texturing surfaces from the aspects of performance enhancement, pattern design and manufacturing technology in combination with the development trend of textured surfaces’ intelligence and digitization.

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Unravelling chemical etchant influences during assisted wet-transfer to obtain high quality MoS2 atomic layers

Singh,

Xu,

Ghiami

et al. 2024

Applied Surface Science

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Research on Sapphire Deep Cavity Corrosion and Mask Selection Technology

Cited by 3 publications

References 18 publications

Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes

Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes

Status and prospects of surface texturing: design, manufacturing and applications

Unravelling chemical etchant influences during assisted wet-transfer to obtain high quality MoS2 atomic layers

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