To study the electrochemical properties of Yb doped CaZrO3 in more detail, the CaZr1 − xYbxO3−δ (x = 0.000, 0.025, 0.050, 0.075 and 0.100) solid electrolyte specimens were prepared by high temperature solid state method at the temperatures of 1523 K and 1873 K for 8 h. XRD, SEM, EDS and electrochemical workstation were used to test the micro morphology and electrochemical performance of the electrolyte samples. According to the experimental results, the total conductivity of electrolyte CaZr1 − xYbxO3−δ is 6.30×10− 6 to 1.28×10− 3S/cm and the conductivity activation energy falls in 0.69 ~ 1.34 eV in hydrogen and oxygen atmosphere at 973 ~ 1173℃. The chemical diffusion coefficient of hydrogen in CaZr1 − xYbxO3−δ electrolyte is between 1.55×10− 6 and 5.82×10− 6 cm2/s in the temperature range of 973 to 1373K and the diffusion activation energy is 12278kJ/mol. When the doping amount of Yb is 0.05, the electrolyte sample has excellent electrical properties.