2024
DOI: 10.1088/1361-665x/ad37ba
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Research on the mechanism and control methods of mechanical drift in linear ultrasonic motors

Xinjian Li,
Zhiyuan Yao,
Hao Xu

Abstract: Linear ultrasonic motors (LUMs) have advantages such as de-energized self locking and-micro-nano displacement resolution. However, the presence of mechanical drift negatively affects their positioning and control accuracy, thereby limiting their application in ultra-precision fields. The mechanism of mechanical drift in the motor is currently unclear. In this study, we initially employ the Burgers model for the stator’s clamp and consider the internal friction and stick-slip effects of the slider, enabling the… Show more

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