Research on the Preparation of the Microstructure on ITO Film by Excimer Laser Based on Particle Array

Yan, 吴燕 Wu; Lingfei, 季凌飞 Ji; Qiurui, 李秋瑞 Li; Yijian, 蒋毅坚 Jiang

doi:10.3788/al20133302.0150

应用激光

2013

DOI: 10.3788/al20133302.0150

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Research on the Preparation of the Microstructure on ITO Film by Excimer Laser Based on Particle Array

吴燕 Wu Yan¹,

季凌飞 Ji Lingfei²,

李秋瑞 Li Qiurui³

et al.

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Research on the Preparation of the Microstructure on ITO Film by Excimer Laser Based on Particle Array

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