2012
DOI: 10.1007/s11431-012-4997-0
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Research on the surface passivation of nanostructure-textured crystalline silicon solar cell

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Cited by 2 publications
(1 citation statement)
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“…In order to improve the efficiency of solar cells, b-Si needs excellent surface passivation [ 11 ]. Although a wide variety of films can be selected, such as SiN x [ 12 ] and SiO 2 [ 13 ], the Al 2 O 3 thin film deposited by atomic layer deposition (ALD) is the best choice for passivating b-Si [ 14 ]. On the one hand, ALD, which has a conformal growth on surface with high aspect ratio features [ 15 ] and pinhole-free nature [ 16 ], is the natural choice for the coating of nanostructured surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…In order to improve the efficiency of solar cells, b-Si needs excellent surface passivation [ 11 ]. Although a wide variety of films can be selected, such as SiN x [ 12 ] and SiO 2 [ 13 ], the Al 2 O 3 thin film deposited by atomic layer deposition (ALD) is the best choice for passivating b-Si [ 14 ]. On the one hand, ALD, which has a conformal growth on surface with high aspect ratio features [ 15 ] and pinhole-free nature [ 16 ], is the natural choice for the coating of nanostructured surfaces.…”
Section: Introductionmentioning
confidence: 99%