Research on Transverse Sensitivity Property of Cymbal Piezoelectric Vibration Acceleration Sensor

Abstract

For the problem of higher transverse sensitivity ratio of the cymbal piezoelectric vibration acceleration sensors, a mathematical model of output voltage sensitivity is established which employ orthogonal and array methods to reduce the transverse sensitivity ratio of the piezoelectric vibration acceleration sensor. Two compensation methods are designed. The results showed that the array and orthogonal methods can decrease the effect of the transverse interference of acceleration sensor effectively and control the relative error in a smaller range, improve the measurement accuracy of the sensors.

Directivity Modeling and Simulation Analysis of a Novel Structure MEMS Piezoelectric Vector Hydrophone

“…However, the transverse effect was not completely eliminated, and its directivity was still offset by approximately 5° [ 25 , 26 ]. In 2011, Chengzhe Li et al proposed two compensation methods to reduce transverse effects based on the cymbal piezoelectric accelerometer, but both of them require multiple sensors to cooperate [ 27 ]. In 2014, Yan Liu et al introduced an improved figure of merit (FOM) that encompasses resonant frequency, sensitivity, and transverse sensitivity [ 28 ].…”

Modeling and Studying Acceleration-Induced Effects of Piezoelectric Pressure Sensors Using System Identification Theory

“…To measure transient pressure accurately, piezoelectric pressure sensors must compensate for the acceleration-induced effects. Typical methods to eliminate the acceleration-induced effects mainly focus on reducing the mass of the piezoelectric element or improving the mechanical rigidity of the piezoelectric element [ 4 , 5 ]. This inevitably leads to a decrease in the sensitivity of the sensor.…”