2022
DOI: 10.3390/mi13030359
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Research Progress of MEMS Inertial Switches

Abstract: As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furth… Show more

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Cited by 17 publications
(4 citation statements)
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“…Slow (milliseconds and microseconds) Optical Switches: Micro-electrical mechanical switches (MEMS) switches are micrometer-scale devices that rely on mechanical moving micro-mirrors to switch the optical signal from input ports to output ports [69]. An array of N2 micro-mirrors is needed to build a N×N direct switching MEMS switch.…”
Section: Optical Switches: State-of-artmentioning
confidence: 99%
“…Slow (milliseconds and microseconds) Optical Switches: Micro-electrical mechanical switches (MEMS) switches are micrometer-scale devices that rely on mechanical moving micro-mirrors to switch the optical signal from input ports to output ports [69]. An array of N2 micro-mirrors is needed to build a N×N direct switching MEMS switch.…”
Section: Optical Switches: State-of-artmentioning
confidence: 99%
“…Therefore, the inertial switch has the great advantage of acting like an open circuit when not active in the OFF state; it consumes power only when the threshold is exceeded (near zero power consumption). With the emergence of the Internet of Things (IoT), tremendous amounts of inertial sensors are increasingly in demand to meet the market’s needs 6 8 . In most cases, inertial switches are designed to have a single threshold which can only provide binary “ON/OFF’ information 9 15 .…”
Section: Introductionmentioning
confidence: 99%
“…With the development of MEMS, researchers have put forward various MEMS inertial switches with high threshold acceleration in fuze, aerospace and other fields over the last decades [5][6][7]. On account of the impact acceleration can be up to ten thousand g, Cao et al [8] proposed a single circular mass for universal sensitivity to guarantee the survivability of high-g inertial switch.…”
Section: Introductionmentioning
confidence: 99%