2017
DOI: 10.1587/elex.14.20170673
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RESET failure analysis of phase change memory based on Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>

Abstract: Some nonvolatile phase change memory (PCM) cells with 80 nm heating electrodes are found early RESET failure. The causes, which result in the early failure of the PCM, have been studied. Compared the energy dispersive X-ray spectroscopy (EDS) results, it is observed some segregation has occurred in the components at the positions close to the TiN and bottom electron contact (BEC) interface for the early failed cells. The main causes are considered to be the unstable interface between the Ti-rich TiN and the Ge… Show more

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Cited by 4 publications
(2 citation statements)
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“…1. Alloys along this line exhibit fast switching and pronounced electrical/optical contrast between amorphous and crystalline phases [8], which is exemplified by the most well-known PCM -Ge 2 Sb 2 Te 5 (GST) [9,10]. Other PCMs in addition to GST, such as Ag/In doped Sb 2 Te alloys, enabled faster switching speed due to their growthdominated crystallization [11].…”
Section: Storage Materials and Design Principlesmentioning
confidence: 99%
“…1. Alloys along this line exhibit fast switching and pronounced electrical/optical contrast between amorphous and crystalline phases [8], which is exemplified by the most well-known PCM -Ge 2 Sb 2 Te 5 (GST) [9,10]. Other PCMs in addition to GST, such as Ag/In doped Sb 2 Te alloys, enabled faster switching speed due to their growthdominated crystallization [11].…”
Section: Storage Materials and Design Principlesmentioning
confidence: 99%
“…On the contrary, C is responsible for an improved endurance up to more than 10 8 cycles if compared to standard GST that start to fail after 10 6 cycles. Moreover C-GST shows a better RESET state stability along cycling, while material evolution is evidenced in standard GST already after 10 4 cycles [11]. It should be noted that no intelligent or optimized endurance procedures were applied voluntarily, in order to compare the behavior of the two materials with same cycling conditions.…”
Section: Endurance and Retention Analysesmentioning
confidence: 99%