2002
DOI: 10.1016/s0304-8853(01)00668-0
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Residual stress change by thermal annealing in amorphous Sm−Fe−B thin films

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Cited by 9 publications
(6 citation statements)
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“…T opt increases from 225 1C for a 50 nm thick layer to 300 1C for a 1 mm thick layer. Such behaviours have been already observed in previous works, for films of similar composition [3,4] as well as for other Fe-based amorphous alloys [5].…”
Section: Magnetic Properties Of Finemet Thin Filmssupporting
confidence: 84%
“…T opt increases from 225 1C for a 50 nm thick layer to 300 1C for a 1 mm thick layer. Such behaviours have been already observed in previous works, for films of similar composition [3,4] as well as for other Fe-based amorphous alloys [5].…”
Section: Magnetic Properties Of Finemet Thin Filmssupporting
confidence: 84%
“…The previous research of Na et al [8] and Zhou et al [9] demonstrated that strong internal stress was induced as films cooled during the sputtering deposition of SmFe 2 /Fe multilayers, due to the different thermal coefficients of expansion (a) of films and substrates (SmFe 2 : a¼12.0 Â 10 À 6 1C À 1 ; glass: a¼7.54 Â 10 À 6 1C À 1 ; pure Fe: a¼11.7 Â 10 À 6 1C À 1 ). Moreover this internal stress was compressive, and would induce a uniaxial magnetic anisotropy in the plane direction of the films.…”
Section: Soft-magnetic Property Of Smfe 2 Series Filmsmentioning
confidence: 94%
“…Compared to the magnetron sputtering, there is a higher wavelength shift in electroplating, which reflects higher residual stress in Fe-C than in Ag. Residual stress can be relaxed by annealing 15,16 to avoid the cracks of film. However, appropriate stress may enhance the adherence between film and fiber.…”
Section: Fe-c Film Electroplatingmentioning
confidence: 99%