2024
DOI: 10.1016/j.jmapro.2024.04.007
|View full text |Cite
|
Sign up to set email alerts
|

Residual stress distribution of silicon wafers machined by rotational grinding based on molecular dynamics

Haijun Liu,
Qilong Zhang,
Jing Zhou
et al.
Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2024
2024
2025
2025

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
references
References 26 publications
0
0
0
Order By: Relevance