2021
DOI: 10.1016/j.surfcoat.2020.126664
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Residual stresses and tribomechanical behaviour of TiAlN and TiAlCN monolayer and multilayer coatings by DCMS and HiPIMS

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Cited by 48 publications
(22 citation statements)
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“…Choosing the right deposition technique is of great importance when fabricating a tool coating. Thus, there have been some studies whose compare some of these techniques in the deposition of tool coatings, as seen in the study presented by Tillman et al [46] where a comparison between DCMS (Direct Current Magnetron Sputtering) and HiPIMS in the deposition of TiAlN and TiAlN/TiAlCN coatings is made. The films were deposited in heat-treated AISI H11 steel, and the samples were evaluated regarding wear resistance and residual stresses.…”
Section: Introductionmentioning
confidence: 99%
“…Choosing the right deposition technique is of great importance when fabricating a tool coating. Thus, there have been some studies whose compare some of these techniques in the deposition of tool coatings, as seen in the study presented by Tillman et al [46] where a comparison between DCMS (Direct Current Magnetron Sputtering) and HiPIMS in the deposition of TiAlN and TiAlN/TiAlCN coatings is made. The films were deposited in heat-treated AISI H11 steel, and the samples were evaluated regarding wear resistance and residual stresses.…”
Section: Introductionmentioning
confidence: 99%
“…The better performance by the T2 tools can also be attributed to the coating’s residual compressive stresses, as HiPIMS usually produces coatings with higher values of these stresses, when compared to PVD dc MS deposition technique [ 37 , 38 ]. Moreover, these stresses can be beneficial to produce a better machined surface quality [ 51 ].…”
Section: Resultsmentioning
confidence: 99%
“…The HiPIMS technique also produces coatings with higher adhesive strength to the substrate [ 37 ], which can be related to the wear performance of the coating, with good adhesion to the substrate causing an increase in the coating’s wear resistance [ 20 ]. Also worth considering, is the residual stresses present in each coating type, the HiPIMS technique generally produces coatings with higher compressive stresses [ 38 ], which can cause an increase in cutting performance and wear behavior [ 16 , 51 ].…”
Section: Resultsmentioning
confidence: 99%
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“…During the deposition of Ti-N thin film by HPPMS, a substrate bias applied to the substrate further increases the energy of the Ti and N ions, which is beneficial for dense and defect-free Ti-N thin film deposition [13]. However, the high-energy ion bombardment increases the residual stress of the thin films [14], which results in the peeling-off of thin films and thus, catastrophic failure [15]. In addition, during the Ti-N thin film deposition by HPPMS, a compound layer is formed on the target surface (also known as target poisoning) [13], which affects the discharge and plasma characteristics of the Ti target.…”
Section: Introductionmentioning
confidence: 99%