In this study, the structural, physicochemical and digestion characteristics of finger millet-resistant starch (FRS) prepared by ultrasonic (UP-FRS), ultrasonic-autoclaving (UAP-FRS), enzymolysis (EP-FRS) and ozonation (OP-FRS) were studied. Different preparation methods have different degrees of damage to the morphological structure and granular shape of the starch, but the resistant starch obtained by ultrasonic, ultrasonic-autoclaving and enzymolysis exhibited a same crystallinity pattern (B-type polymorph), and typical V-type modified starch was obtained by ozone treatment. That caused them to have different physicochemical properties. The solubility (8.2%) and swelling power (2.5%) of OP-FRS were the smallest; the sedimentation value of the UAP-FRS increased steadily with the increase of time and showed the largest (16.7%). UP-FRS required the most energy for complete gelatinization (ΔH, 145 J g −1 ), and the gelatinization temperature range of the samples was significantly different (P < 0.05). In addition, UP-FRS and OP-FRS had strong anti-digestion ability in vitro, and their digestion rate was lower than 30%. All these results are expected to provide information on the preparation and application of FRS, and may indicate that the specific processing of food before consumption could be used as new pathways for regulating the digestibility properties of food.