2011
DOI: 10.1002/smll.201101015
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Resizing Metal‐Coated Nanopores Using a Scanning Electron Microscope

Abstract: Electron beam-induced shrinkage provides a convenient way of resizing solid-state nanopores in Si(3) N(4) membranes. Here, a scanning electron microscope (SEM) has been used to resize a range of different focussed ion beam-milled nanopores in Al-coated Si(3) N(4) membranes. Energy-dispersive X-ray spectra and SEM images acquired during resizing highlight that a time-variant carbon deposition process is the dominant mechanism of pore shrinkage, although granular structures on the membrane surface in the vicinit… Show more

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Cited by 7 publications
(10 citation statements)
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“…The faces of the nanocube exposed to the e-beam were coated with a noticeable carbon layer when viewed head-on under TEM (Figure 1A). While EBID is useful for a variety of applications, 15,17,21 it is a potential problem for SERS applications, which are extremely sensitive to surface contamination.…”
Section: Resultsmentioning
confidence: 99%
See 3 more Smart Citations
“…The faces of the nanocube exposed to the e-beam were coated with a noticeable carbon layer when viewed head-on under TEM (Figure 1A). While EBID is useful for a variety of applications, 15,17,21 it is a potential problem for SERS applications, which are extremely sensitive to surface contamination.…”
Section: Resultsmentioning
confidence: 99%
“…In order to determine the impact of the amorphous carbon on the ability to functionalize the Ag nanocubes post SEM imaging, we investigated the dependence of carbon deposition on e-beam current and exposure time, and then evaluated its impact on the SERS signals coming from the probe molecules. 1517 …”
Section: Resultsmentioning
confidence: 99%
See 2 more Smart Citations
“…For example, the nanopores size could be tuned, shrinking in most cases, through depositing materials or thermal heating. [15][16][17] Nevertheless, few is reported about the structure reconstruction of the solid-state nanopores. As a subgroup of solid-state nanopores, the glass nanopipette is modeled as a cost-effective and versatile source of conical shaped nanopore and has been used for single DNA, protein, and nanoparticle (NP) analysis.…”
Section: Introductionmentioning
confidence: 99%