Resolution Analysis of Varied Line-Space Grating Angular Displacement Sensor

Donghui, 王东辉 Wang; Lin, 刘林 Liu; Puchao, 郑普超 Zheng; Bingshi, 李秉实 Li; Yan, 包艳 Bao; Bing, 张兵 Zhang; Chao, 张超 Zhang

doi:10.3788/lop50.060501

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“…根据表 3 得到改进的局部优化算法变栅距全息光栅刻线密度函数 N1 和局部优化算法下的和变栅距全息光栅刻线密度函数 N2，即 ì í î N 1 = 600 -0.7869y + 6.5573 × 10 -4 y 2 -3.8229 × 10 -7 y 3 N 2 = 600 -0.7990y -5.4121 × 10 -4 y 2 -6.2159 × 10 -7 y 3 . (14) 图 [24] 表示为…”

Section: 刻线密度函数分布曲线unclassified

Design of a Varied-Line-Space Plane Grating in EUV Spectrum

Yan-xiu¹,

Bayanheshig²,

Shuo³

et al. 2015

光学学报

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To make varied-line-space holographic grating which in applied in the extreme ultraviolet band (501 50 nm), a new optimization algorithm applied to spherical wavefront system is proposed, named the improved local optimization algorithm. According to the request of instruments, expected varied-line-space holographic grating density function is built. Based on this density function, the merit function is given, of which characteristic is transforming four merit functions to one merit function which has multivariate and nonlinear constrains. Using the improved local algorithm, the error of groove density coefficient is reduced and the resolution of gratings is improved due to the weighted, the diversity of the initial value, the limitation of the recording parameters values range and the constraint of groove density coefficients. Compared with the conventional local optimization algorithm, using the improved local optimization algorithm makes absolute error between design and expected groove density in 0~0.02 line/mm range. And the order of magnitude is improved and the resolution increases from 4000 to above 17000. Results show that by adopting the suited optimization algorithm, varied-line-space plane grating with a high resolution can be made in the spherical wavefront system.

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Section: 刻线密度函数分布曲线unclassified