Resonance analysis of microwave cylindrical cavity using an electromagnetic simulator

Janiszewski, M.; Sachse, K.; Francik, A.

doi:10.1109/mikon.2000.913973

Cited by 3 publications

(2 citation statements)

References 1 publication

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Information on resonant frequency is extremely useful when designing and optimizing structure for various applications [10,11].…”

Section: Introductionmentioning

confidence: 99%

“…To ensure accuracy, a numerical estimation method was developed for identifying the resonant modes in the microwave cylindrical cavities loaded by dielectric slabs [10]. A frequency sweep solution was also employed to obtain the frequency response of the imaginary part of the port's admittance and impedance of a closed cylindrical cavity [11]. Although these simulations can sometimes provide excellent prediction of resonant frequencies, the results thus obtained may generally deviate from the actual properties of the microstructures due to unexpected deviation of dimensions, material properties or boundary conditions.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysis

Chen

Huang

Lai

et al. 2008

Meas. Sci. Technol.

View full text Add to dashboard Cite

A dynamic 3D nano-scale surface profilometer was successfully developed for novel automatic resonant frequency identification using stroboscopic interferometric principle. With rapid increase in the application of micro electromechanical systems (MEMS) to industries, the needs of accurate dynamic characterization have become a major challenge in design and fabrication. In view of such, an interferometric microscopy was developed using LED stroboscopic interferometry to achieve dynamic full-field profilometry and characterization of MEMS with a measurement bandwidth exceeding 1 MHz. Most importantly, a novel detection algorithm was also developed employing interferogram fringe density measure for automatic resonant frequency identification. Natural resonant modes of a series of microstructures can be accurately detected, giving values consistent with theoretical ones. To verify the effectiveness of the developed methodology, an AFM cantilever microbeam and a cross-bridge microbeam were measured to analyze their full-field resonant vibratory shapes. Our experimental results confirmed that the resonant vibration of the tested beams can be fully characterized while achieving an accuracy in vertical measurement of 3–5 nm with a vertical measurement range of tens of micrometers.

show abstract

“…Information on resonant frequency is extremely useful when designing and optimizing structure for various applications [10,11].…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysis

Chen

Huang

Lai

et al. 2008

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

Utilization of 3D simulators for characterization of dielectric properties of anisotropic materials

Dankov

Levcheva

Peshlov

2005

2005 European Microwave Conference

View full text Add to dashboard Cite

Derivation of an equivalent circuit of Kurokawa-type oscillator resonance structure using an electromagnetic simulator

Janiszewski¹,

Sachse²,

Francik³

13th International Conference on Microwaves, Radar and Wireless Communications. MIKON - 2000. Conference Proceedings (IEEE Cat.

View full text Add to dashboard Cite

Resonance analysis of microwave cylindrical cavity using an electromagnetic simulator

Cited by 3 publications

References 1 publication

Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysis

Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysis

Utilization of 3D simulators for characterization of dielectric properties of anisotropic materials

Derivation of an equivalent circuit of Kurokawa-type oscillator resonance structure using an electromagnetic simulator

Contact Info

Product

Resources

About