In the conventional neutron activation analysis, the elemental concentrations are normally determined from the comparison ratios between the measured specific activities of the sample and the standard reference material. An advantage in the comparison ratio method is that the systematic error due to neutron self-shielding and multi-scattering effects is canceled out, and the correction factors can be ignored but the preparation of reference standards to match the same conditions with those of various samples is the main difficulty. In the modern trend of neutron activation analysis, the K 0-standardization method has been developed and applied in almost all the NAA laboratories. An important research work in the procedure under this method is the characteristic information regarding the neutron source, such as thermal and epithermal neutron fluxes, and epithermal spectrum shape-factor. These neutron spectrum parameters are experimentally determined by using the activation foils, in which the corrections for all neutron effects cause systematic errors should be taken into account. Using the MCNP5 code, a wellknown Monte Carlo simulation program, the results of correction factors of thermal, epithermal and resonance neutron self-shielding factors for Au, Co, Mn, W activation foils are presented in this chapter.