“…Among them, FMRs have gained extensive application across diverse fields due to their miniature, precise, and efficient performance [8][9][10][11].They are extensively used in microelectronics [12,13], micromechanics [14,15], biomedicine [16,17], and chemical sensing [18,19], providing significant technical support for research and development in these areas. FMRs can be classified into groups of electrostatic excitation [20], electromagnetic excitation [21], piezoelectric excitation [7], and thermal excitation [22] based on the mode of excitation. Piezoelectric excitation, with its high energy density, ease of integration, frequency scaling, simple measurement, and low power consumption configuration, makes piezoelectric an attractive solution for various applications, such as sensors [19,23], actuators [24,25], energy harvesters [26,27], communication modules [28,29], etc.…”