Resonant accelerometer with self-test

Aikele, M.; Bauer, Karin; Ficker, W.; Neubauer, F. M.; Prechtel, U.; Schalk, J.; Seidel, H.

doi:10.1016/s0924-4247(01)00558-1

Cited by 115 publications

(55 citation statements)

References 10 publications

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“…There are several mechanisms for acceleration sensing viz., piezoelectric (Okada 1995), piezoresistive (Roylance and Angell 1979;Allen et al 1989;Plaza et al 1998;Pak et al 1996;Wang et al 2003;Patridge et al 2000;Lim et al 1999;Sim et al 1998;Kwon and Park 1998;Ning et al 1995;Chen et al 1997;Eklund and Shkel 2007;Amarasinghe et al 2006;Kal et al 2006), capacitive (Butefisch et al 2000;Yazadi et al 2003;Wang et al 2007;Rödjegård et al 2005;Takao et al 2001), tunneling (Dong et al 2005), vibrating beam/resonant beam (Aikele et al 2001;Tabata and Yamamoto 1999;Burns et al 1996), etc. Even though each of the above acceleration sensing mechanisms has its own advantages and limitations, piezoresistive accelerometers are widely used due to its structural simplicity, simple fabrication process and read out circuit compared to the other accelerometers.…”

Section: Introductionmentioning

confidence: 99%

Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer

2008

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This paper presents realization of a MEMS piezoresistive single axis accelerometer using dual doped TMAH solution. The silicon micromachined structure consists of a heavy proofmass supported by four thin flexures and sandwiched between top and bottom glass plates. Boron diffused piezoresistors located near fixed points of the flexure are used for sensing the developed stress due to applied acceleration. Based on the initial results an improved design has also been considered to achieve reduced cross-axis sensitivity and nonlinearity. The fabricated sensor tested upto 13 g acceleration shows average sensitivity of 0.556 mV/g along normal to the proofmass plane. The measured cross-axis sensitivity was 3.272 lV/g for X-axis and 3.442 lV/g for Y-axis which is less than 1% of Z-axis sensitivity. Comparing two designs there was an improvement of 63% sensitivity along Y-axis for the design with flexures placed along the proofmass edges.

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Section: Introductionmentioning

confidence: 99%

Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer

2008

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“…For example, it has been used to describe the motion of a levitated particle in an electromagnetic trap [53,54], and is the basis for the analysis of the properties of vibrating beam accelerometers [55][56][57]. The Hamiltonian for the Duffing oscillator can be written in the general form, using dimensionless position and momentum operatorsq andp,…”

Section: Example System -Duffing Oscillatormentioning

confidence: 99%

Multiparameter estimation along quantum trajectories with sequential Monte Carlo methods

2017

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This paper proposes an efficient method for the simultaneous estimation of the state of a quantum system and the classical parameters that govern its evolution. This hybrid approach benefits from efficient numerical methods for the integration of stochastic master equations for the quantum system, and efficient parameter estimation methods from classical signal processing. The classical techniques use Sequential Monte Carlo (SMC) methods, which aim to optimize the selection of points within the parameter space, conditioned by the measurement data obtained. We illustrate these methods using a specific example, an SMC sampler applied to a nonlinear system, the Duffing oscillator, where the evolution of the quantum state of the oscillator and three Hamiltonian parameters are estimated simultaneously.

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“…An example of a microsensor system already introduced in the automotive market is the air-bag accelerometer. [10,11] In this case, special functions such as self-test, calibration, and bus interface have been included in the system. Systems for engine emission and combustion control, based on microsensors, are also being developed.…”

Section: Automotive Sensorsmentioning

confidence: 99%