Resonant bending sensor based on sputtered Galfenol

Wenzel, Christian; Adolphi, B.; Merkel, U.; Jahn, Α.; Marschner, Uwe; Ziske, Johannes; Neubert, Holger; Fischer, Wolf‐Joachim

doi:10.1016/j.sna.2009.03.027

Cited by 19 publications

(10 citation statements)

References 8 publications

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“…The other solution is to integrate magnetostrictive materials into MEMS. Micro-scale copper coils have been created around deposited Galfenol on top of Si and SiO 2 [81][82][83]. Potential achievements need to be further exploited following this path.…”

Section: Discussionmentioning

confidence: 99%

Review of magnetostrictive vibration energy harvesters

Deng

Dapino

2017

Smart Mater. Struct.

146

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The field of energy harvesting has grown concurrently with the rapid development of portable and wireless electronics in which reliable and long-lasting power sources are required. Electrochemical batteries have a limited lifespan and require periodic recharging. In contrast, vibration energy harvesters can supply uninterrupted power by scavenging useful electrical energy from ambient structural vibrations. This article reviews the current state of vibration energy harvesters based on magnetostrictive materials, especially Terfenol-D and Galfenol. Existing magnetostrictive harvester designs are compared in terms of various performance metrics. Advanced techniques that can reduce device size and improve performance are presented. Models for magnetostrictive devices are summarized to guide future harvester designs.

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Section: Discussionmentioning

confidence: 99%

Review of magnetostrictive vibration energy harvesters

Deng

Dapino

2017

Smart Mater. Struct.

146

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“…Fe 100-x Ga x giant magnetostrictive films (GMF) are attracting ever increasing attention for their potential application to manufacturing integrated magnetostrictive displacement sensors [1][2][3]. So, Fe 100-x Ga x films are the suitable candidate of other magnetostrictive materials, e.g., Terfenol-D and Fe-Ga alloy, because of its superior synthetic properties [4].…”

Section: Introductionmentioning

confidence: 99%

Composition Regulation and Microstructure Characterization of Fe_100-xGa_x Films in the Manufacturing Industry

et al. 2021

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Fe100-xGax giant magnetostrictive films (GMF) are attracting ever increasing attention for their potential application to manufacturing integrated magnetostrictive displacement sensors. However, it is difficult to fabricate Fe100-xGax thin films with different compositions at will. The influence of compositions on alloy phases, grain sizes, film surface roughness, and magnetic domains of the films and magnetization of magnetron sputtered Fe100-xGax films was investigated. Changing the ratio of the pure iron slice areas to alloy target areas, the desired film composition was achieved by the improved Mosaic method. The morphologies, magnetic domain structure, microstructure, and compositions of Fe100-xGax films revealed by SEM, EDS, XRD, MFM, VSM, and TEM. The results show that there are <1 1 0 > texture in magnetron sputtered Fe100-xGax films. The sharp peak attributed to the A2 microstructure suggests that the film is crystalline. The magnetic domain structure of Fe100-xGax films presents a network form, and the domain width decreases with the decrease of gallium content. It is also found that the magnetic domains of the films are not uniform. The TEM result shows that there are some strip patterns in the films, and the diffraction ring is discontinuous because of the structure extinction. For a suitable candidate of microdevice applications in MEMS, the optimum composition film should be Fe83.25Ga16.75 film.

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“…It is known that the thin film performance is determined by its microstructure. Thus, it is very important to obtain good microstructure of thin films for improving the performance of the film (Wenzel et al, 2009). Therefore, the key problem is to deposit thin films in a needed microstructures.…”

Section: Introductionmentioning

confidence: 99%

Investigation on microstructures and phases of Fe-Ga alloy films deposited by magnetron sputtering

Yan¹,

Zhao²,

Cha³

et al. 2020

IJNBM

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Galfenol (Fe-Ga alloy), as a new magnetostrictive materials, has potentially wide applications in magnetostrictive devices. In this work, Fe-Ga alloy thin films were prepared by slice-style target magnetron sputtering and investigations on microstructures and phases of Fe-Ga alloy films were made to explore the relationship of properties and microstructures. The results show that the component of alloy thin film is related to physical properties of the material itself as well as the area ratio of the patch and target. The phase formed in the films in is disorderly A 2 phase with face-centred cubic structure. The films prepared by magnetron sputtering exist in the form of polycrystalline with <110> crystallographic texture perpendicular to the film plane. The structure shape of as-deposited specimens present a maze domain with different contrast and resolution and the magnetic domain decreased with the increase of the Ga content. With the increase of the Ga content, the magnetic domains become more and more irregular. Fe-Ga thin film morphology is related to the growth mode of the film. The microstructures of Fe-Ga alloy films can be controlled by magnetron sputtering technology.

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Resonant bending sensor based on sputtered Galfenol

Cited by 19 publications

References 8 publications

Review of magnetostrictive vibration energy harvesters

Review of magnetostrictive vibration energy harvesters

Composition Regulation and Microstructure Characterization of Fe_100-xGa_x Films in the Manufacturing Industry

Investigation on microstructures and phases of Fe-Ga alloy films deposited by magnetron sputtering

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Resonant bending sensor based on sputtered Galfenol

Cited by 19 publications

References 8 publications

Review of magnetostrictive vibration energy harvesters

Review of magnetostrictive vibration energy harvesters

Composition Regulation and Microstructure Characterization of Fe100-xGax Films in the Manufacturing Industry

Investigation on microstructures and phases of Fe-Ga alloy films deposited by magnetron sputtering

Contact Info

Product

Resources

About

Composition Regulation and Microstructure Characterization of Fe_100-xGa_x Films in the Manufacturing Industry