Neutral silicon clusters Sin (up to n = 7) and their cations Si + n (up to n = 10) have been produced by femtosecond laser ablation of bulk silicon in vacuum and investigated using time-offlight mass spectrometry. Two populations of the Si + n clusters with different velocity and abundance distributions in the ablation plume have been clearly distinguished. Possible mechanisms of cluster formation (Coulomb explosion, gas-phase condensation, phase explosion) are discussed.PACS: 52.38. MF; 61.46.+w; 79.20.Ds Femtosecond laser ablation is a rapidly developing technique offering new possibilities in various applications. The fundamental mechanisms that lead to material removal are, however, still poorly understood. The interaction of fs laser pulses with silicon is an example of a complex interplay of thermal and ultrafast, nonthermal processes involved to ablation [1,2,3]. Studies of composition and expansion dynamics of the laser-induced plume can provide a considerable insight into the ablation mechanisms. Several recent experiments on this subject [2,4,5,6] were mainly devoted to the atomic component of the plume though an observation of small silicon clusters was also mentioned [2]. Little is known about silicon cluster formation under ablation with short laser pulses. With ns pulses, low-fluence desorption of Si dimers [7] and small neutral Si n clusters [8] were observed. Desorption of small clusters from both crystalline and nanostructured Si surfaces was induced by using high-energy (6.4 eV) photons [9]. Multiple-charged cluster ions were formed in ps-laser stimulated field evaporation [10]. Recently we reported the first results on the observation of neutral and cationic clusters under femtosecond laser ablation of silicon [11]. In this work, we analyze mechanisms of clusters formation based on measurements of the abundance and velocity distributions.
I. EXPERIMENTThe experiments were performed with Si[100] surface under ultrahigh vacuum conditions (∼ 10 −10 mbar). The Si target was irradiated at a 45˚incidence angle using a Ti:sapphire laser (Mai-Tai coupled with a TSA amplifier, Spectra Physics, 80 fs pulse duration, 10 Hz rep- * Fax: +7 3832 343480, Tel.: +7 3832 391045; Electronic address: bulgakov@itp.nsc.ru † Electronic address: ozerov@crmcn.univ-mrs.fr ‡ Electronic address: marine@crmcn.univ-mrs.fr etition rate, up to 30 mJ energy per pulse) operating at 800 nm. A part of the laser beam was selected by an aperture to provide a nearly uniform intensity distribution over the irradiated spot. The target was rotated/translated during measurements to avoid considerable cratering. Some experiments were performed with the fixed target in order to investigate the effect of accumulation of laser pulses at the same spot. The fluence on the target was varied in the range 80-800 mJ/cm 2 . The abundance distributions of neutral and positively charged particles in the laser-ablation plume were studied using a reflectron time-of-flight mass spectrometer. The neutral particles were analyzed using electron impact...