Resonant langasite microsensor for atomic force microscopy

Abstract

Quartz length-extension resonators have already been used to get atomically-resolved imaging by frequencymodulation atomic force microscopy. New piezoelectric materials such as Langasite could be appropriate for this application. Theoretical study is reported on length extension resonators in this material. In this paper, an attempt to fabricate micro resonators in Langasite temperature-compensated cuts is prospected. The pointed tip of the micromachined cantilever can be used for atomic force microscopy applications.

Resonant LGS microsensor for scanning microdeformation microscopy

“…Microfabrication process [11] After a photolithographic process to make the electrodes, the sample is put in an HCl-based solution for at least 6 hours. Such a solution has been chosen using etch rates results, and because this solution doesn't induce any film formation at the surface of the LGS samples.…”