Resonant Magnetic Field Sensors Based On MEMS Technology

Abstract

Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.

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“…Resonant magnetic field sensors based on microelectromechanical system (MEMS) have important advantages, including small size, lightweight, low power consumption, and high resolution [8][9][10]. These sensors use the Lorentz force to detect an external magnetic field.…”

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“…The MEMS devices can integrate mechanical and electronic components on a common substrate through the microfabrication technology (Zha 2006). These microdevices present advantages such as small size, light weight, low power consumption, minimum cost, good sensitivity and high resolution (for a review see Herrera-May et al 2009b). Actually, the MEMS magnetic field sensors can achieve a resolution close to 1 nT and have a wide dynamic range from 1 nT to values above of 1 T (Herrera-May et al 2009b).…”

“…These microdevices present advantages such as small size, light weight, low power consumption, minimum cost, good sensitivity and high resolution (for a review see Herrera-May et al 2009b). Actually, the MEMS magnetic field sensors can achieve a resolution close to 1 nT and have a wide dynamic range from 1 nT to values above of 1 T (Herrera-May et al 2009b). These sensors can be included as a part of magnetic storage devices, automotive sensors, navigation systems, medical and military instruments (for a review see Lenz and Edelstein 2006).…”