Resonant transformation of acoustic waves observed for the diamond based HBAR

Gennagy, Kvashnin; Boris, Sorokin; Arseniy, Telichko

doi:10.1109/fcs.2015.7138866

Cited by 2 publications

(1 citation statement)

References 13 publications

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“…Effect of energy trapping was observed in the conventional piezoelectric resonators and was explained by authors [31] as a total internal reflection of acoustic beam on the vertical borders within the resonator's aperture. Such effect was observed in HBARs too [32], but it has a more complex nature. As an example, the appearance of energy trapping in the PLS #3 is represented in Figure 26.…”

Section: D Fem Simulation Results Of Acoustic Wave Propagation In Dimentioning

confidence: 91%

Piezoelectric-Layered Structures Based on Synthetic Diamond

Sorokin¹,

Квашнин²,

Telichko³

et al. 2016

Piezoelectric Materials

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Resuρts oλ theoreticaρ, modeρinμ, and exυerimentaρ investiμation oλ microwave acoustic υroυerties oλ υiezoeρectric ρayered structure Me /"ρN/Me / diamond have been υresented within a wide λreφuency band . -GHz. The hiμhest amonμ πnown materiaρ φuaρity υarameter Q × f ~ Hz λor the IIa tyυe synthetic diamond at oυerationaρ λreφuency ~ GHz has been λound. Conditions oλ UHF excitation and υroυaμation oλ the buρπ, surλace, and Lamb υρate acoustic waves have been estabρish-ed and studied exυerimentaρρy. Freφuency deυendencies oλ the imυedance and φuaρity λactor have been studied to obtain a number oλ υiezoeρectric ρayered structure υarameters as eρectromechanicaρ couυρinμ coeλλicient, eφuivaρent circuit υarameters, etc. Resuρts oλ Γ λinite eρement modeρinμ oλ a μiven υiezoeρectric ρayered structure have been comυared with the exυerimentaρ ones obtained λor the reaρ hiμh-overtone buρπ acoustic resonator. "n oriμin oλ hiμh-overtone buρπ acoustic resonator's sυurious resonant υeaπs has been studied. Resuρts on UHF acoustic attenuation oλ IIa-tyυe synthetic sinμρe crystaρρine diamond have been υresented and discussed in terms oλ "πhiezer and Landau-Rumer mechanisms oλ υhonon-υhonon interaction. Identiλica-tion and cρassiλication oλ Lamb waves beρonμinμ to severaρ branches as weρρ as disυersive curves oλ υhase veρocities have been executed. Necessity oλ introducinμ a more correct Lamb-mode cρassiλication has been recoμnized.

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Section: D Fem Simulation Results Of Acoustic Wave Propagation In Dimentioning

confidence: 91%

Piezoelectric-Layered Structures Based on Synthetic Diamond

Sorokin¹,

Квашнин²,

Telichko³

et al. 2016

Piezoelectric Materials

View full text Add to dashboard Cite

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Lamb waves dispersion curves for diamond based piezoelectric layered structure

Sorokin

Квашнин

Telichko

et al. 2016

Applied Physics Letters

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The presence of spurious peaks in the amplitude-frequency response of diamond based piezoelectric layered structure was shown. Excitation of such peaks results in deterioration of an useful acoustical signal. It was shown that such spurious peaks should be associated with Lamb waves in a layered structure. By means of FEM analysis, the propagation of acoustic waves of different types in the piezoelectric layered structure “Al/AlN/Mo/(100) diamond” has been investigated in detail. By analyzing the elastic displacement patterns at frequencies from 0 up to 250 MHz, a set of all the possible acoustic waves, especially Lamb modes, have been studied, and dispersive curves of phase velocity have been plotted. A revised classification of Lamb modes has been introduced.

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Resonant transformation of acoustic waves observed for the diamond based HBAR

Cited by 2 publications

References 13 publications

Piezoelectric-Layered Structures Based on Synthetic Diamond

Piezoelectric-Layered Structures Based on Synthetic Diamond

Lamb waves dispersion curves for diamond based piezoelectric layered structure

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