Resonant waveguide vs Fabry-Perot cavity: A comparative study for CMOS spectral sensor technology

Omeis, Fatima; Villenave, Sandrine; Besbes, Mondher; Sauvan, Christophe; Benisty, H.

doi:10.1016/j.photonics.2022.101106

Cited by 2 publications

(2 citation statements)

References 36 publications

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“…For instance, an h-FPC that consists of two Bragg mirrors with periodic dielectric rods at the center of the cavity displays an enhanced angular tolerance compared to a planar FPC [10]. In the same context, a more elaborated work was done to show the important features of the h-FPC by comparing its optical performance to that of a resonant waveguide grating (RWG) [11]. This fundamental study evaluated and explored many crucial aspects of both filters, such as TE and TM optical response, angular tolerance, signal to noise ratio, and light collection.…”

Section: Introductionmentioning

confidence: 99%

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Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration

Villenave,

Omeis,

Monfray

et al. 2024

High Contrast Metastructures XIII

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Multispectral sensors such as Ambient Light sensors (ALS) are becoming increasingly popular due to growing concerns for health, environment, and safety. These sensors provide non-intrusive quantitative and qualitative information on the photonic footprints of interest. To meet the demand for mass production, CMOS image sensors (CIS) are a good basis for these devices. Commercial hyperspectral cameras use a generalization of Bayer-like matrix of Fabry-Perot cavities (FPC) as multispectral filters embedded onto a CIS. However, the delicate fabrication of these filters is tedious and leads to a pronounced surface topology. In this study, we demonstrate experimentally that multispectral sensing can be achieved using a hybrid FPC (h-FPC) which is an improved version of the regular FP cavity, that consists of two silicon mirrors, SiO2 spacer, and a sub-wavelength silicon grating at the center of the cavity. These structures were fabricated using a CMOS compatible process and can be integrated into an imager process flow. The h-FPC optical response can be tuned in the near-infrared region (750-950nm) by changing the filling factor of the grating inside the cavity without varying its height, unlike planar FPC. This feature makes the hybrid FPC a more versatile and efficient option for agile multispectral sensing.

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Section: Introductionmentioning

confidence: 99%

“…The present work is an experimental continuation of the numerical study mentioned above on the h-FPC using SimPhotonics FMM [11] [12]. These transmission sensors are fabricated on glass using a CMOS compatible flow.…”

Section: Introductionmentioning

confidence: 99%

Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration

Villenave,

Omeis,

Monfray

et al. 2024

High Contrast Metastructures XIII

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Pixels and resonators with blazed Littrow structures: Passive and non-Hermitian approaches

Bardonnet,

Crocherie,

Besbes

et al. 2023

Applied Physics Letters

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The confinement of light by Littrow blazed grating structures is explored for targeted device operation principles. For passive devices, these grating structures are explored in one and two-dimensional versions to study resonant pixel with sizes of about ten grating periods (for 4.5 μm-side), which retain a CMOS compatible design. The resonances are found to substantially enhance the weak silicon absorption at 940 nm, a wavelength of interest for, e.g., distance ranging and face recognition, and to achieve a 7.5° angular tolerance. The addition of gain and loss in generic Littrow structures that display an original dispersion made of crossing manifold is next considered, with a view to the issue of broad-area laser modal control.

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Resonant waveguide vs Fabry-Perot cavity: A comparative study for CMOS spectral sensor technology

Cited by 2 publications

References 36 publications

Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration

Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration

Pixels and resonators with blazed Littrow structures: Passive and non-Hermitian approaches

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