2005
DOI: 10.1016/j.nimb.2005.06.075
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Resonant X-ray Raman scattering for Al, Si and their oxides

Abstract: High-resolution measurements of the resonant X-ray Raman scattering (RRS) of Al and Si and their oxides were performed at the European Synchrotron Radiation Facility (ESRF) in Grenoble, France, using a von Hamos Bragg-type curved crystal spectrometer. To probe the influence of chemical effects on the RRS X-ray spectra, Al 2 O 3 and SiO 2 samples were also investigated. The X-ray RRS spectra were measured at different photon beam energies tuned below the K-absorption edge. The measured spectra are compared to r… Show more

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Cited by 5 publications
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“…The practical importance of the XRRS phenomenon has been recognized in the determination of ultra-trace impurities on substrates, such as the detection of low Z elements (e.g. Al, oxides) in silicon wafers by TXRF [7][8][9][10], Pt in ancient gold [11] and Ni in copper substrates [12]. In these cases the energies of the fluorescence lines of the impurities are just below the absorption edge of the main substrate or matrix element.…”
Section: Introductionmentioning
confidence: 99%
“…The practical importance of the XRRS phenomenon has been recognized in the determination of ultra-trace impurities on substrates, such as the detection of low Z elements (e.g. Al, oxides) in silicon wafers by TXRF [7][8][9][10], Pt in ancient gold [11] and Ni in copper substrates [12]. In these cases the energies of the fluorescence lines of the impurities are just below the absorption edge of the main substrate or matrix element.…”
Section: Introductionmentioning
confidence: 99%