Response behaviour of tin oxide thin film gas sensors grown by MOCVD

Effects of Water Concentration on the Structural and Optical Properties of FTO Thin Films Grown by Home Made SISOM’S SPEED Technique

“…on the properties of sprayed FTO films have been studied to determine the optimal deposition conditions to obtain as high electrical conductivity and optical transparency as possible [24][25][26]. Among the techniques that have been previously employed are: Thermal evaporation [4,9], Sputtering [11][12], Chemical vapour deposition [13][14][15], Sol-gel coating [4,16], Painting [4,17], Spray pyrolysis [4,6,8],Magnetron Sputtering [19], SPEED technique [21,26,38] and Photo chemical vapor deposition [20].Most of the above techniques have produced high quality FTO films. But, there are still few challenges which limit their usage.…”

Gas sensing of Au/n-SnO2/p-PSi/c-Si heterojunction devices prepared by rapid thermal oxidation

“…Thin films are synthesized using sols, which are prepared using either alkoxide (Park and Mackenzie 1996) or chloride (Sakai et al 2001) precursors utilizing either dip (Park and Mackenzie 1996) or spin (Sakai et al 2001) coating methods. Synthesis of SnO 2 thin films using hydrothermally treated sol (Sakai et al 2001;Baik et al 2000) and other conventional techniques such as ionassisted deposition (Choi et al 1997;Song et al 1998), sputtering (Cha et al 1994;Malyshev et al 1992), evaporation (Carbajal et al 2000), chemical vapor deposition (Brown et al 2000), spray pyrolysis (Niranjan et al 2002) have been reported. On the other hand, thick films are processed using a paste (Mishra and Agarwal 1994;Devi et al 1999;Shimizu et al 1993;Katsuki and Fukui 1998) prepared by mixing SnO 2 powder and a binder in a suitable solvent such as water or acetone, which is then applied using screen printing technology (Mishra and Agarwal 1994) on a suitable substrate.…”

Investigations on humidity sensing of nanostructured tin oxide synthesisedviamechanochemical method

“…Sensors in the form of thin or thick films are very attractive because they have many advantages such as simple construction, low cost and miniature weight. They can be prepared by several techniques such as chemical vapour deposition, evaporation and sputtering [6][7][8][9]. Thick-film deposition of metal oxide materials is an advance technology that offers low cost and considerable versatility towards different applications.…”