Response characteristics of a MEMS resonant accelerometer to external acoustic excitation

Park, ByungSu; Lee, Sang‐Woo; Han, Kyung-Jun; Yu, Min; Chang, Byungsu

doi:10.1109/icsens.2016.7808717

Cited by 4 publications

(2 citation statements)

References 7 publications

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“…On the other hand, the demand for the MEMS IMU is increasing due to the miniaturization and cost reduction of weapon systems. Therefore, various studies are being undertaken to analyze the effects of disturbances on the IMU and to improve them [3][4][5][6][7][8][9]. In order to carry out the mission, the weapon system experiences injection or separation.…”

Section: Introductionmentioning

confidence: 99%

A Study on the Design of Isolator and the Mounting Method for Reducing the Pyro-Shock of a MEMS IMU

Ryu

Park

Lee

et al. 2022

Sensors

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In this paper, we proposed two methods for reducing the pyro-shock of the MEMS Inertial Measurement Unit (IMU). First, we designed the vibration isolator for reducing the pyro-shock inside the IMU. However, it turned out that there is a limit to reducing the pyro-shock with only the vibration isolator. Therefore, we improved the pyro-shock reduction performance by changing the method of mounting on the flight vehicle. Four mounting options were tested and one of them was adopted. The results showed the best reduction performance when we designed the vibration isolator with an aluminum integrated structure. When mounting, two methods were applied. One was to insert a bracket with a different material between the mounting surface and IMU and the other was to insert a set of three washers that was stacked in a PEEK-metal-PEEK order at each part of the screw connections.

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Section: Introductionmentioning

confidence: 99%

A Study on the Design of Isolator and the Mounting Method for Reducing the Pyro-Shock of a MEMS IMU

Ryu

Park

Lee

et al. 2022

Sensors

Self Cite

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“…As a kind of micro-electro-mechanical system (MEMS) accelerometer, a silicon resonant micro-accelerometer has the advantages of a direct digital signal output, high sensitivity, high resolution, wide dynamic range, strong anti-interference ability, and good stability [1][2][3][4][5]. It has the advantage of being useable to develop a higher-precision microelectromechanical accelerometer.…”

Section: Introductionmentioning

confidence: 99%

Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

Huang

Qin

et al. 2021

Micromachines

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This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one displacement is introduced under the action of acceleration, which reduces the influence of processing errors on the performance of the accelerometer. The two resonators form a differential structure that can diminish the impact of common-mode errors. This accelerometer realizes the separation of the introduction of electrostatic stiffness and the detection of resonant frequency, which is conducive to the decoupling of accelerometer signals. An improved differential evolution algorithm was developed to optimize the scale factor of the accelerometer. Through the final elimination principle, excellent individuals are preserved, and the most suitable parameters are allocated to the surviving individuals to stimulate the offspring to find the globally optimal ability. The algorithm not only maintains the global optimality but also reduces the computational complexity of the algorithm and deterministically realizes the optimization of the accelerometer scale factor. The electrostatic stiffness resonant micro-accelerometer was fabricated by deep dry silicon-on-glass (DDSOG) technology. The unloaded resonant frequency of the accelerometer resonant beam was between 24 and 26 kHz, and the scale factor of the packaged accelerometer was between 54 and 59 Hz/g. The average error between the optimization result and the actual scale factor was 7.03%. The experimental results verified the rationality of the structural design.

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Design and simulations of a resonant accelerometer

Zhang

et al. 2017

Microsyst Technol

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Response characteristics of a MEMS resonant accelerometer to external acoustic excitation

Cited by 4 publications

References 7 publications

A Study on the Design of Isolator and the Mounting Method for Reducing the Pyro-Shock of a MEMS IMU

A Study on the Design of Isolator and the Mounting Method for Reducing the Pyro-Shock of a MEMS IMU

Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

Design and simulations of a resonant accelerometer

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