Eurosensors 2018 2018
DOI: 10.3390/proceedings2130795
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Response Characteristics of Silicon Microring Resonator Hydrogen Sensor

Abstract: A silicon microring-resonator (MRR) hydrogen sensor which utilizes platinum-loaded tungsten oxide (Pt/WO3) thin film was fabricated and evaluated. The uniform film was deposited on MRR portion by using sol-gel technique. By the exposure to pure hydrogen gas, the sensor devise showed the large resonant wavelength shift at room temperature. It is suggested that the change in the optical properties of hydrogen sensitive layer results in this response.

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“…MRRs are used in many optical devices, such as dispersion compensators [1], lasers [2,3], optical modulators [4,5], optical switches [6,7], delay lines [8,9], isolators [10,11], optical memories [12,13], and sensors [14,15]. MRR filters are a viable device in the wavelength division multiplexing (WDM) system to extract a wavelength over a broad spectral range.…”
Section: Introductionmentioning
confidence: 99%
“…MRRs are used in many optical devices, such as dispersion compensators [1], lasers [2,3], optical modulators [4,5], optical switches [6,7], delay lines [8,9], isolators [10,11], optical memories [12,13], and sensors [14,15]. MRR filters are a viable device in the wavelength division multiplexing (WDM) system to extract a wavelength over a broad spectral range.…”
Section: Introductionmentioning
confidence: 99%