Response of Ultra Precision Machine under Micro Environment Vibration

Abstract

For the study of response of ultra-precision machine under environment vibration and its influences on machining precision, the numerical simulation method is adopted in this paper, the equipment modes are analyzed for the rationality of established model compared to the test results; and the frequency response of the machine excited by the measured ambient vibration acceleration power spectral shows that the table displacement reaches up to 0.396μm, exceeding the value allowed. Therefore, it’s significant to consider the micro environment vibration in ultra-precision processing.

Environmental vibration influence on the blade inspection by an optical scanning device

“…The environmental vibration frequencies of the main sources are shown in Table 1 [10]. The measured environmental vibration shows that all kinds of vibration wave generated by vibration sources are random and superposition.…”