RETRACTED: MSFGQ: Design of an efficient Multiparametric model for improving sub-field scheduling performance via novel GA & Q-Learning optimizations
Vinay H. Keswani,
Paritosh Peshwe
Abstract:This paper presents the design of a novel multiparametric model aimed at improving sub-field scheduling performance for lithographic processes. The proposed model incorporates various parameters such as sub-field locations, conflict analysis, critical dimensions, delay, current, voltage, dose, and depth of current for optimization of scheduling operations. To achieve this, we have utilized both Genetic Algorithm (GA) and Q-learning algorithms to optimize the scheduling performance in real-time lithographic pro… Show more
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