RETRACTED: Study of Optimum Laser Fluence for Actuation of Shape Memory Alloy Sheet for MEMS Applications

Abstract

Thin sheet shape-memory alloys (SMAs) have garnered considerable attention and acclaim for their exceptional potential as top-performing materials within the realm of Micro Electro Mechanical System (MEMS) applications. Sensor/ Actuators play a crucial role in operation of all MEMS offering a multitude of functionalities. In this paper laser resistance actuation of SMA- sheet is done by focused spot laser and optimum laser fluence is obtained to avoid ablation at different power input. Effect of ablation on element composition of SMA-sheet is done with the help of Scanning Electron Microscope (SEM images) and Energy-dispersive X-ray spectroscopy (EDS).