2014
DOI: 10.1016/j.diamond.2013.11.001
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Reversible photo-induced deformation of amorphous carbon nitride thin films

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Cited by 18 publications
(20 citation statements)
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“…The maximum value of δ t was obtained by the specimen deposited at 573 K when the incident light was turned on. Although the reason for the maximum value of δ t observed in the a-CN x films deposited at 573 K has not been elucidated yet, we think that the existence of the C≡N triple bonds is necessary for the displacement and, in particular, the structures with the high A i /A n ratio and relatively small graphite cluster size play an important role for the displacement [9,10].…”
Section: Resultsmentioning
confidence: 90%
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“…The maximum value of δ t was obtained by the specimen deposited at 573 K when the incident light was turned on. Although the reason for the maximum value of δ t observed in the a-CN x films deposited at 573 K has not been elucidated yet, we think that the existence of the C≡N triple bonds is necessary for the displacement and, in particular, the structures with the high A i /A n ratio and relatively small graphite cluster size play an important role for the displacement [9,10].…”
Section: Resultsmentioning
confidence: 90%
“…From this figure, it is found that τ off-on is smaller than τ on-off in all of the specimens deposited at different temperatures. We think that this behavior is related to the fact that the a-CN x films intrinsically have compressive stress [9,18]. The shape of the as-deposited a-CN x films is upper convex to the film side due to ultrathin substrates.…”
Section: B Photomechanical Response Of A-cnx Filmsmentioning
confidence: 95%
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“…Nitrogen doping increases the dielectric constant of the DLC film, while fluorine doping decreases it [9,10]. Nitrogen doping also makes the film photosensitive [11]. Fluorine doping also improves biocompatibility of the DLC film to exclude formation of thrombi at the surface [12,13].…”
Section: Introductionmentioning
confidence: 97%
“…During the past decade, interesting electrical and optical properties have been reported, such as a low dielectric constant [14], high photoconductivity [15], a variable band gap [16], and strong secondary electron emission by heavy ions [17,18]. More recently, photo-induced deformation was also reported [19]. This large spectrum of interesting properties is due to the great variety of bonding states, which consist of a mixture of sp 1 , sp 2 , and sp 3 configurations.…”
Section: Introductionmentioning
confidence: 97%