2021
DOI: 10.1149/2162-8777/ac02a4
|View full text |Cite
|
Sign up to set email alerts
|

Review—Important Considerations Regarding Device Parameter Process Variations in Semiconductor-Based Manufacturing

Abstract: This paper reviews the topic of the device parameter variations using semiconductor-based manufacturing of micro- and nano-devices. There is considerable misunderstanding about the precision of these types of manufacturing methods and that smaller does not always mean more precise. This issue is very important to many types of devices made using semiconductor manufacturing, particularly those having analog functionality including MEMS, NEMS, photonics, analog ICs, and nanotechnologies. It also is getting incre… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 6 publications
(1 citation statement)
references
References 80 publications
0
1
0
Order By: Relevance
“… Adaptability to process variations: Semiconductor production processes can exhibit variations due to material differences or equipment disparities. Future research should explore AI techniques that can adapt and generalize effectively across diverse process variations, ensuring robust quality control [16].  Augmenting real-time decision-making: Achieving optimal production rate and minimization of defects in semiconductor production requires executing decision-making processes in real-time.…”
Section: Challenges and Future Directionsmentioning
confidence: 99%
“… Adaptability to process variations: Semiconductor production processes can exhibit variations due to material differences or equipment disparities. Future research should explore AI techniques that can adapt and generalize effectively across diverse process variations, ensuring robust quality control [16].  Augmenting real-time decision-making: Achieving optimal production rate and minimization of defects in semiconductor production requires executing decision-making processes in real-time.…”
Section: Challenges and Future Directionsmentioning
confidence: 99%