Highly oriented LiFePO4 thin-film electrodes were fabricated via chemical solution deposition combined with spin coating. The effects of the precursor concentrations and types of substrates on microstructures and electrochemical performances were studied. Single-phase LiFePO4 with orientations perpendicular to the (211)/(020) and (311) planes prepared using stainless steel as substrate presents the capacity of 4.9 μAh•cm-2 and the apparent activation energy of 59.2 kJ•mol-1, indicating its great potential to be used as cathode material for lithium thin film batteries. of substrates on microstructures and electrochemical performances were studied. Fieldemission scanning electron microscopy, X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy were employed to characterize the morphology, the crystal structure, the chemical composition, and the element valence states. The electrochemical behaviour was studied by means of cyclic voltammetry, charge/discharge cycling, and electrochemical impedance spectroscopy. Single-phase LiFePO 4 with orientations perpendicular to the (211)/(020) and (311) planes prepared using stainless steel as substrate presents the capacity of 4.9 μAh·cm -2 and the apparent activation energy of 59.2 kJ·mol -1 , indicating its great potential to be used as cathode material for lithium thin film batteries.