Review of flexible microelectromechanical system sensors and devices

Yang, Xiaopeng; Zhang, Menglun

doi:10.1063/10.0004301

Cited by 38 publications

(17 citation statements)

References 145 publications

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“…(d) Stretching and compression response of buckled GaAs ribbons and SEM image of a sample. Reproduced from ref . Available under a creative common license.…”

Section: Fabrication Approaches For Wearable Bolometersmentioning

confidence: 99%

“…Hence, the direct integration of bolometers with bendable substrates is a useful technique for achieving the elastic properties of a device with the benefit of bolometers and CMOS or polymer substrate processing compatibility. Using this method, MEMS devices that are already on the market may be employed right away (Figure b, c) . For instance, micromachining, microelectronics, biotechnology, and MEMS technology can all be used to create the entire system.…”

Section: Fabrication Approaches For Wearable Bolometersmentioning

confidence: 99%

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Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

Padha,

Yadav,

Dutta

et al. 2023

ACS Appl. Electron. Mater.

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Incorporating nano-and microelectromechanical systems (NEMS/MEMS)-based sensors in clothing and developing more compact and flexible devices have gained popularity recently. NEMS/MEMS-based bolometers/sensors have gained significance due to their high sensitivity and accuracy in measuring physical parameters such as temperature, humidity, pressure, and infrared (IR) and ultraviolet (UV) radiations. When worn on the body, bolometers can be employed in various applications such as environmental monitoring or health tracking. This review highlights the progress of smart wearable bolometers as NEMS/ MEMS-based sensors in the healthcare industry. Instead of visiting multiple healthcare facilities or devices, now people can assess their health status by measuring body temperature, sensing motion, respiratory functioning, blood pressure, oxygen levels of the blood, and heart functioning by integrating these devices into fabriclike garments, socks, shoe insoles, wrist watches, and other pieces of clothing. The article concludes by describing their varied challenges and possible solutions and prospects.

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“…(d) Stretching and compression response of buckled GaAs ribbons and SEM image of a sample. Reproduced from ref . Available under a creative common license.…”

Section: Fabrication Approaches For Wearable Bolometersmentioning

confidence: 99%

Section: Fabrication Approaches For Wearable Bolometersmentioning

confidence: 99%

Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

Padha,

Yadav,

Dutta

et al. 2023

ACS Appl. Electron. Mater.

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“…Chitosan obtained with this protocol also presents optimal piezoelectric properties suggesting its use in complex systems integrating radiofrequency antennas with microelectromechanical transducers (MEMs) [17,18]. The exploitation of chitosan-based biocompatible materials in a wearable antenna whose Specific Absorption Rate (SAR) is lower than the maximum threshold allows envisioning the design and realization of an Internet of Healthcare Things (IoHT) biosensor node.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a Plastic-Free Antenna on a Sustainable Chitosan Substrate

Marasco

Niro

Marzo

et al. 2023

IEEE Electron Device Lett.

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The majority of wearable and flexible 5G and 6G devices are based on plastic substrates, that are harmful to the environment. Therefore, the development of sustainable and plastic-free radio frequency (RF) devices becomes a crucial issue. In this regard, we present a fully biocompatible Planar Inverted-F Antenna (PIFA), fabricated on a 55 µm-thick chitosan substrate. Chitosan has a relative dielectric constant of 5. This antenna is working at 4.5 GHz in the sub-6 GHz band of the 5G spectrum. It has a very compact footprint of 14 x 23 mm 2 and a Specific Absorption Rate (SAR) of 0.41 W/kg. The prototype has been fabricated using an innovative fabrication protocol. A very good agreement between numerical and experimental results has been obtained. The measured realized gain is equal to 1 dBi at the resonant frequency. Our results demonstrate the suitability of chitosan as a dielectric substrate for the fabrication of plastic-free antennas and paves the way for the development of sustainable wearable devices for the Internet of Healthcare Things (IoHT) applications.

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“…Many related words have emerged as the name of the modern research field that deals with microscopic length scales of transport routes and liquid-based devices, such as "MEMSfluids" or "Bio-MEMS" and "microfluidics" (El Alami et al,2019& Onishi et al, 2017. MEMS fabrication (Rius et al,2017) and actuation techniques (Algamili et al,2021& Tiwary et al,2021 are seen in many application areas, including (Khorsandi et al,2021) microfluidics, microactuator, biomedical (Mohd Ghazali et al,2020, automotive (Bhatt et al,2019), micro-robotics (Bucˇinskas et al,2021& Ghosh et al,2021, wearable devices (Yang et al,2021& Cao et al,2021, and microsensors (Unalli et al,2020& Waqar et al,2021. In addition, different biomaterials, such as cells, organoids, and microorganisms, have been used in a variety of microfluidic chip applications (Tian et al,2019.…”

Section: Introductionmentioning

confidence: 99%

Investigation of time-based pressure control for microfluidics chip design

Ersoy

Atakök²,

Khorsandi³

et al. 2022

JER is an international, peer-reviewed journal that publishes f

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The emergence of the microfluidic chip was a game-changer in microbiological analysis platforms. This technology, by combining physics, chemistry, biology, and computing, helps researchers to obtain precise results in a shorter time. However, it requires more advancements in order to lessen its limitations. This study presents the design, modelling, and microbiological analysis of a microelectromechanical system (MEMS) based microfluidic chip. Three different microfluidic chips have been developed during the design process. These chips have different inlet channels and one outlet channel. The modelling process was carried out with Multiphysics Software. Pressure and velocity data in micron-sized channels were checked for each system. The flow directions of the fluids in the inlet and outlet channels were observed according to the pressure change. As a result of the analysis, the highest velocity was found in the microfluidic chip with three inlet channels. In comparison, the highest pressure was measured in the microfluidic chip with four inlet channels. These values are 2.36 x10-17 m/s and 13.5 Pa, respectively. The pressure values of the 4 and 5-channel microfluidic chips were very close. The results showed that as the number of inlet channels increased, the pressure value in the microfluidic chip increased, but the velocity value decreased.

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Review of flexible microelectromechanical system sensors and devices

Cited by 38 publications

References 145 publications

Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

Design and Fabrication of a Plastic-Free Antenna on a Sustainable Chitosan Substrate

Investigation of time-based pressure control for microfluidics chip design

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