2013
DOI: 10.1002/cvde.201300051
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Review of CVD Synthesis of Graphene

Abstract: Abstract:This article presents an overview of the research highlights in graphene synthesis by Chemical Vapor Deposition (CVD). We discuss the growth mechanisms mainly over transition metals and alloys (with emphasis on Cu and Cu alloys), including new developments and experiments in transfer-free graphene growth on dielectric materials. We focus on the role of the different synthesis parameters, including thermodynamic aspects of the chemical process and physical, chemical and morphological properties of subs… Show more

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Cited by 547 publications
(345 citation statements)
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References 149 publications
(232 reference statements)
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“…% Ni) foils occurs mostly during the hydrocarbon exposure at a constant temperature, rather than due to carbon precipitation/ segregation during cooling. 5,42 Despite the assumption, carbon has very low solubility in Cu (<0.001 at. % at 1000 C), 43 and for carbon to precipitate during cooling an equilibrium saturation of carbon atoms in Cu substrate is required, 26 which may not be possible since the CVD growth of graphene (i.e., Cu substrate exposure to carbon source) occurs over few minutes.…”
Section: Discussionmentioning
confidence: 99%
“…% Ni) foils occurs mostly during the hydrocarbon exposure at a constant temperature, rather than due to carbon precipitation/ segregation during cooling. 5,42 Despite the assumption, carbon has very low solubility in Cu (<0.001 at. % at 1000 C), 43 and for carbon to precipitate during cooling an equilibrium saturation of carbon atoms in Cu substrate is required, 26 which may not be possible since the CVD growth of graphene (i.e., Cu substrate exposure to carbon source) occurs over few minutes.…”
Section: Discussionmentioning
confidence: 99%
“…[13] The most popular method involves a wet transfer technique by which a polymer, typically poly(methyl-methacrylate) (PMMA), is coated onto the graphene surface as a supporting layer throughout etchant removal of the deposition catalyst and subsequent transfer to the device substrate. [14] Dissolution of the PMMA layer then yields, ideally, a pristine graphene surface, but a methodology that facilitates complete PMMA removal without graphene degradation has yet to be realised.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, the chemical vapor deposition (CVD) method has been proven to be the most powerful approach to grow large-scale high-quality monolayer graphene [8], and the sheets are usually grown on a Cu substrate. Because of the low catalytic reactivity for dehydrogenation on top of graphene and the negligible carbon solubility in Cu, a graphene sheet with monolayer thickness grows larger and larger on the surface of a Cu substrate.…”
Section: Introductionmentioning
confidence: 99%