Review of Silicon Photonics Technology and Platform Development

Siew, Shawn Yohanes; Li, B.; Gao, Feng; Zheng, Han; Zhang, W.; Guo, Pengfei; Xie, Shangran; Song, Andy; Dong, Bi‐Zhen; Luo, Lian-Wee; Li, C.; Luo, Xianshu; Lo, Guo‐Qiang

doi:10.1109/jlt.2021.3066203

Cited by 565 publications

(251 citation statements)

References 110 publications

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“…One advantage of this method is that all the necessary components are readily available in a standard silicon photonics process. 31 Another advantage is that only one switch at each matrix stage needs to be operated at a time, and the number of matrix stages necessary is log 2ðNÞ. Therefore, for an array with N elements, only log 2ðNÞ switches are operated at once.…”

Section: Switched Mzi Matrixmentioning

confidence: 99%

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Review of lens-assisted beam steering methods

Spector

2022

J. Optical Microsystems

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Lens-assisted beam steering (LABS) has emerged as a promising solution for compact chip-based optical beam steering for light detection and ranging (LiDAR) applications. In a LABS system, light is steered within an integrated optical chip and emitted at a desired location. This emitted light is focused out into the scene with a lens, analogous to a camera operating in reverse. LABS systems offer many advantages compared to competing technologies such as solid-state reliability, simple control, compactness, and fast random access scanning. Different methods for LABS systems are described and compared. Most LABS systems demonstrated thus far have small arrays, and therefore, only offer a relatively small number of possible beam locations. It is important to understand how these systems will scale to the much larger arrays needed for a practical LiDAR system.

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Section: Switched Mzi Matrixmentioning

confidence: 99%

“…Ring resonators are a wavelength sensitive device, commonly available in most silicon foundry processes. 31 In a ring resonator, the light will transfer from the input bus to the output waveguide only when the light has a wavelength that is resonant with the ring. 33 Off resonance, the light will stay on the bus waveguide.…”

Section: Ring Resonator Switchesmentioning

confidence: 99%

Review of lens-assisted beam steering methods

Spector

2022

J. Optical Microsystems

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“…Since this review of silicon photonics is quite a personal history and a story of my contributions to the field, almost all the cited works refer to my own papers. The interested reader can find relevant literature in the original papers or in other recent reviews [12][13][14][15][16][17][18][19][20][21][22][23][24]. At the end of each subsection, I cite few references where recent contributions to the related field are reported.…”

Section: Introductionmentioning

confidence: 99%

Thirty Years in Silicon Photonics: A Personal View

Pavesi

2021

Front. Phys.

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Silicon Photonics, the technology where optical devices are fabricated by the mainstream microelectronic processing technology, was proposed almost 30 years ago. I joined this research field at its start. Initially, I concentrated on the main issue of the lack of a silicon laser. Room temperature visible emission from porous silicon first, and from silicon nanocrystals then, showed that optical gain is possible in low-dimensional silicon, but it is severely counterbalanced by nonlinear losses due to free carriers. Then, most of my research focus was on systems where photons show novel features such as Zener tunneling or Anderson localization. Here, the game was to engineer suitable dielectric environments (e.g., one-dimensional photonic crystals or waveguide-based microring resonators) to control photon propagation. Applications of low-dimensional silicon raised up in sensing (e.g., gas-sensing or bio-sensing) and photovoltaics. Interestingly, microring resonators emerged as the fundamental device for integrated photonic circuit since they allow studying the hermitian and non-hermitian physics of light propagation as well as demonstrating on-chip heavily integrated optical networks for reconfigurable switching applications or neural networks for optical signal processing. Finally, I witnessed the emergence of quantum photonic devices, where linear and nonlinear optical effects generate quantum states of light. Here, quantum random number generators or heralded single-photon sources are enabled by silicon photonics. All these developments are discussed in this review by following my own research path.

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“…The use of comparatively small grating periods represents the main technological challenge in the realization of high-performing devices based on SWG metamaterials. Structures sometimes include small features near the resolution limit of dry deep-ultraviolet (DUV) lithography tools [22]. Several demonstrations of SWG-based devices with features larger than about 120 nm and compatible with dry DUV lithography have been proposed in the literature but this normally constraints the available design space and the range of achievable material properties, making the design more complex and ultimately impacting performance [23].…”

Section: Introductionmentioning

confidence: 99%

Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

et al. 2021

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Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication constraints, such as minimum feature size, that restrict the available design space or compromise compatibility with high-volume fabrication technologies. Indeed, most successful SWG realizations so far relied on electron-beam lithographic techniques, compromising the scalability of the approach. Here, we report the experimental demonstration of an SWG metamaterial engineered beam splitter fabricated with deep-ultraviolet immersion lithography in a 300-mm silicon-on-insulator technology. The metamaterial beam splitter exhibits high performance over a measured bandwidth exceeding 186 nm centered at 1550 nm. These results open a new route for the development of scalable silicon photonic circuits exploiting flexible metamaterial engineering.

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Review of Silicon Photonics Technology and Platform Development

Cited by 565 publications

References 110 publications

Review of lens-assisted beam steering methods

Review of lens-assisted beam steering methods

Thirty Years in Silicon Photonics: A Personal View

Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

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