Review on mid-spatial frequency error suppression in optical components manufacturing

Deng, Yonghong; Hou, Xi; Li, Bincheng; Wang, Jia; Zhang, Yun

doi:10.1007/s00170-023-11408-y

Cited by 13 publications

(3 citation statements)

References 94 publications

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“…These deviations are reflected in the different spatial frequencies in spatial distribution. Scholars divide the frequency band error into three parts: the Figure, Mid-Spatial Frequency (MSF), and High Spatial Frequency (HSF) [25,35]. The scallop height is defined as the unremoved area between adjacent grinding wheel paths.…”

Section: The Correlation Between Scallop Height and Surface Roughnessmentioning

confidence: 99%

Effect of Wheel Path in Raster Grinding on Surface Accuracy of an Off-Axis Parabolic Mirror

Li,

Guo

et al. 2023

Applied Sciences

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Off-axis parabolic mirrors have extensive applications in X-ray optics, with the precision of their curvature directly impacting grazing-incidence focusing performance. Notably, the off-axis parabolic surface has non-rotating and non-symmetrical characteristics. Ultra-precision raster grinding utilizing a diamond wheel is a common method. Crucially, establishing an optimal wheel path stands as the key to ensuring surface accuracy during off-axis paraboloid grinding. In this study, according to the double curvature property of an off-axis parabolic surface, two different wheel paths were compared: one tracing the meridian direction (parabolic generatrix) and the other following the arc vector direction (arc). The results showed that the wheel path in raster grinding stepping along the arc vector direction can obtain a smaller scallop height and higher surface accuracy. The surface accuracy of one step along the arc vector direction is 9.6 μm, and that of the other step along the meridian direction is 32.6 μm. A model of the scallop height was established based on the relative relationship between adjacent wheel paths, and the error is within 5%. According to the correlation between scallop height and shape error, we conducted an analysis of the spatial distribution of shape errors under varying wheel paths. The wheel path that steps along the arc vector is more suitable for raster grinding of the off-axis paraboloid. The above study can provide theoretical guidance for the wheel path planning of off-axis parabolic mirrors with high surface accuracy.

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Section: The Correlation Between Scallop Height and Surface Roughnessmentioning

confidence: 99%

Effect of Wheel Path in Raster Grinding on Surface Accuracy of an Off-Axis Parabolic Mirror

Li,

Guo

et al. 2023

Applied Sciences

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“…Sub-aperture polishing techniques applied to optical components using CNC machining inherently produce surface irregularities known as ripple errors. These errors, often referred to as MSFR give rise to minor angle scattering within the optical system, consequently exerting a substantial impact on the overall imaging quality of optical systems [1][2][3][4][5]. Numerous researchers have conducted comprehensive investigations to reduce MSFR in optical components.…”

Section: Introductionmentioning

confidence: 99%

Experimental studies on smoothing process for aspheric optical components

Deng,

Hou,

et al. 2023

Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manu

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“…in numerous fields. Optical interferometry boasts a versatile range of applications spanning numerous domains, including but not limited to surface profile [1], industrial inpection [2], changes in refractive index of objects [3] and biomedical Interferometry [4], and optical inspection plays a pivotal role in the optical processing workflow [5].…”

Section: Introductionmentioning

confidence: 99%

Fast and high precision phase recovery technology of single-shot ineterferogram based on depth convolution neural network

Kuang,

Li,

Liu

et al. 2023

J. Opt.

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Phase retrieval from single interferogram is of great interest for the possibility of dynamic phase measurement. However, it is a very complicated process in reality since the unknowns and knows are highly unequal. In this paper, we propose a fast phase recovery method from single interferogram based on deep convolution neural network. The network is trained based on supervised learning to achieve the purpose of quickly obtaining unwrapped phase results from a single interferogram. To improve the detection accuracy, a modified set establishment model has been propose to improve the practicability of the fringe data. The simulation and experimental results show that the root mean square value of residual phase extraction error by this method is closed to 0.01λ (λ = 632.8 nm), and the constructed depth convolution neural network model has significant flexibility and effective generalization ability for phase recovery of single frame interference fringe.

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Review on mid-spatial frequency error suppression in optical components manufacturing

Cited by 13 publications

References 94 publications

Effect of Wheel Path in Raster Grinding on Surface Accuracy of an Off-Axis Parabolic Mirror

Effect of Wheel Path in Raster Grinding on Surface Accuracy of an Off-Axis Parabolic Mirror

Experimental studies on smoothing process for aspheric optical components

Fast and high precision phase recovery technology of single-shot ineterferogram based on depth convolution neural network

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